氮化镓基微盘结构光学谐振腔具有波长选择范围宽、模式体积小和激射阈值低等特点，其在腔量子电动力学、低阈值激光器、生物传感器等方面具有重要的研究价值。通过优化制备微盘的干法刻蚀工艺及选择性湿法腐蚀技术，制备出侧壁陡峭且光滑的高Q值Si衬底GaN基回音壁模式微盘谐振腔，该微盘谐振腔的制备工艺简单、表面损伤小。在室温、266nm短波长激光泵浦条件下，微盘谐振腔激光器实现了激射，阈值为2.85MW/cm2 ，Q值达到2161。

GaN-based microdisk optical resonators own such characteristics as wide wavelength coverage, small mode volume and ultra-low emission threshold, thus they have broad applications in the fields of cavity quantum electrodynamics, low threshold lasers and biosensors. In this paper, the dry etching process and selective wet etching process were optimized, and a low ion damage microdisk resonator with smooth and vertical side wall was obtained. 266nm shortwave laser pumping method was used to study the characteristics of optical microdisk cavity at room temperature. Finally, a microcavity laser with Q value of 2161 and the lasing threshold of 2.85MW/cm2 was successfully fabricated.