基于微通道板(MCP)的延迟线阳极探测器利用信号到达延迟线两端的时间差得到入射光子的位置信息, 具有高空间分辨率、 高计数率的特点, 被广泛应用于紫外光谱成像系统中。 分析了延迟线阳极紫外光子探测器的工作原理, 提出一种新型二维延迟线阳极, 仅由阳极表面收集经MCP倍增后的电子云团, 上层延迟线直接收集电子, 下层延迟线通过置于顶层的焊盘收集电子。 该阳极采用印刷电路板(PCB)加工制作, 大大简化了制作工艺。 测试结果表明, 阳极探测器空间分辨率FWHM优于92 μm, 成像非线性小于100 μm。 实验结果证明了该延迟线阳极探测器进行紫外光子成像的可行性, 为研制远紫外波段成像光谱仪提供了理论基础及实验指导。

Delay-line anode detector based on MCP electron multiplier detect the incident photon’s location by the arrival time difference of the MCP output charge pulse at each end of delay line. Due to their high spatial resolution and high counting rate, photon counting detectors with delay line anode have been widely used in ultraviolet spectral imaging systems. Operational principle of ultraviolet photon detector based on delay line anode is analyzed, and a novel two-dimensional serpentine delay line anode is designed. Electron cloud output from MCP is collected only by the anode surface. The upper serpentine delay line receives the MCP output charge directly, while the lower serpentine delay line receives the charge using a series of pads and vias. This anode is made of printed circuit board instead of laser etching, which greatly simplifies the fabrication process. Photon counting detector with this type of anode achieves a 92 μm FWHM resolution. And the image linearity is better than 100 μm. The results of theory analysis and experiments demonstrated the feasibility of ultraviolet photon imaging system. It provides a theoretical basis and experiments guidance for the development of ultraviolet imaging spectrometers.