光学技术, 2017, 43 (6): 561, 网络出版: 2017-12-25
基于PSD的微摆镜角度自准直测试系统设计
Design of an autocllimator swing micro-mirror angle measurement system based on PSD
位置敏感探测器(PSD) 微摆镜 角度测量 自准直 折返式结构 PSD swing micro-mirror angle measurement autocllimator foldback system
摘要
基于压电陶瓷的微摆镜是一种典型的二维角驱动部件, 微摆镜系统的实用化需要进行微角度的测量, 以便得到驱动电压与微偏转角之间的对应关系。设计了一种基于位置敏感探测器(PSD)的微摆镜角度测试系统, 应用激光自准直原理, 采用两次45°折返式结构, 缩小了系统的体积并解决了传统折返式系统难以精准搭建的问题; 采用多层前馈神经网络法对PSD进行了非线性校正, 修正后整个系统的测量精度可达0.5″, 测量范围为±400″。符合微摆镜角度测量的要求。
Abstract
The swing micro-mirror based on piezoelectric ceramics is a typical two-dimensional angle-driving component. In order to get the relationship between the control voltage and the deflection angle, the angle of the swing micro- mirror has to be measured. An autocllimator swing micro-mirror angle measurement system based on PSD is designed. The system is applied the theory of autocollimate. The twice 45° foldback system is adopted in order to reduce the volume of the system and solve the accurate build problem of traditional foldback system; Multilayer feedforward neural network is used to correct 2-D PSD nonlinear error. The measurement range is ±400″ and the accuracy is 0.5″ of the system after corrected. That can meet the application requirements of swing micro-mirror.
何玉婷, 米凤文, 金伟其, 刘明奇, 胡亮亮. 基于PSD的微摆镜角度自准直测试系统设计[J]. 光学技术, 2017, 43(6): 561. HE Yuting, MI Fengwen, JIN Weiqi, LIU Mingqi, HU Liangliang. Design of an autocllimator swing micro-mirror angle measurement system based on PSD[J]. Optical Technique, 2017, 43(6): 561.