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一种二极管型红外热探测器热学参数的电学等效测试方法

An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector

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摘要

红外热探测器的热学参数包括热容、热导、热响应时间,反应了结构信息和器件性能。精确有效地获得这些参数,对探测器的结构优化与性能评估具有指导意义。二极管型红外热探测器是红外热探测器的主要类型之一。基于二极管型红外热探测器的自热效应,提出了一种热学参数的电学等效测试方法,具有测量精度高且实现简单的特点。并对自制的一款二极管型红外焦平面阵列像元进行了测试,测试结果与理论分析相符,验证了方法的可行性。

Abstract

Thermal parameters of infrared thermal detector include thermal capacity, thermal conductance and thermal response time, reflecting the structure information and performance of detector. Accurate and effective measurement of these thermal parameters is important for device performance evaluation and optimization. A diode-type infrared detector is an important infrared detector. Based on the self-heating effect of diode-type infrared heat detectors, an equivalent electrical test method was developed. The method has the advantages of high precision and easy implementation. The pixel of the self-made diode-type infrared focal plane array was tested by this method. The results were in good agreement with the theoretical analysis, and the feasibility of the method was verified.

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DOI:10.11972/j.issn.1001-9014.2019.06.017

所属栏目:Photoelectric Technology and Application

基金项目:国家自然科学基金; 北京市科委重点研发计划; National Natural Science Foundation of China; the Key R&D Program of Beijing Municipal Science and Technology Commission;

收稿日期:2019-03-30

修改稿日期:--

网络出版日期:2019-12-27

作者单位    点击查看

Chao LIU:Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 00029, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, China
Ying HOU:Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 00029, ChinaWuxi Innovation Center for Internet of Things, Wuxi 214028,China
Jian-Yu FU:Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 00029, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, ChinaWuxi Innovation Center for Internet of Things, Wuxi 214028,China
Rui-Wen LIU:Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 00029, China
De-Bo WEI:Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 00029, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, China
Da-Peng CHEN:Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 00029, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, ChinaWuxi Innovation Center for Internet of Things, Wuxi 214028,China

联系人作者:Jian-Yu FU(fujianyu@ime.ac.cn); Rui-Wen LIU(liuruiwen@ime.ac.cn);

备注:国家自然科学基金; 北京市科委重点研发计划; National Natural Science Foundation of China; the Key R&D Program of Beijing Municipal Science and Technology Commission;

【1】A RogalskiA Rogalski. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. Infrared Physics & Technology. 54, 136-154(2011).

【2】M Vollmer and K P M?llmann. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. John Wiley & Sons. (2017).

【3】Su- Xia XING, Jun- Ju ZHANG and Ben- Kang CHANG. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. 红外与激光工程). 33(5), 441-444(2004).

【4】J Y Fu, H P Shang and H T Shi. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. J. Micromench. Microeng. 26, (2016).

【5】V G Malyarov, I A Khrebtov and V Kulikov Yu. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. Moscow. 3819, 136-142(1999).

【6】C HansonC Hanson. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. Proceedings of SPIE. 2020, 330-339(1993).

【7】A Graf, M Arndt and M Sauer. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. Measurement Science and Technology. 18, 59-75(2007).

【8】I Tomohiro, U Masashi and E Kazuyo. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. Of SPIE. 3698, 556-564(1999).

【9】S Eminoglu, M Y Tanrikulu and T Akin. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. J. Microelectromech. Syst. 17(1), 20-30(2008).

【10】. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. (0).

【11】D Fujisawa, S Ogawa and H Hata. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. 905-908(2015).

【12】Wen- Jing JIANG, OU Wen and An- Jie MING. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. J. Micromech. Microeng. 23, (2013).

【13】E Selim, M Y Tanrikulu and S T Deniz. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. SPIE Infrared Detectors Focal Plane Arrays VII. 4721, 111-121(2002).

【14】De- Hui Xu, Bin Xiong and Yue- Lin Wang. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. of SPIE. 8191, (2011).

【15】. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. (0).

【16】M C Yeong, S S Jin and H Thunter. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. Sensors and Actuators A. 55, 43-47(1996).

【17】B. Charlot, S. Mir and F. Parrain. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. Testing: Theory Appl. 17(6), 459-470(2001).

【18】. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. (0).

【19】N Takashima and M Kimura. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. 2197-2202(2007).

【20】Qiang ZHANG, Rui-Wen LIU and Wen-Long LV. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. 微纳电子技术). 55(9), 617-624(2018).

【21】S Samtia, P K Guha and S Z Ali. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector. IEEE Sensors Journal. 10(5), 997-1002(2010).

引用该论文

Chao LIU,Ying HOU,Jian-Yu FU,Rui-Wen LIU,De-Bo WEI,Da-Peng CHEN. An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector[J]. Journal of Infrared and Millimeter Waves, 2019, 38(6): 798-804

Chao LIU,Ying HOU,Jian-Yu FU,Rui-Wen LIU,De-Bo WEI,Da-Peng CHEN. 一种二极管型红外热探测器热学参数的电学等效测试方法[J]. 红外与毫米波学报, 2019, 38(6): 798-804

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