研究了一种以蓝宝石为基底的可见光/激光/中红外“三光合一”窗口保护型硬质增透膜。首先开展了蓝宝石基底无吸收型硬质氧化物膜层的制备及其工艺最优化的研究,同时基于离子源工艺参数与反应气体流量的控制实现一种中波无吸收的低折射率Si1-xOx膜层,从而实现了全氧化物膜系在中红外波段上的应用。以此为基础,对蓝宝石基底可见光/激光/中红外三波段窗口膜系进行了优化设计与沉积仿真研究。经过大量镀制实验与工艺改进,最终制备出光学与机械性能良好的“三光合一”窗口薄膜,可见光至中红外波段上的平均透过率达到95%以上。镀膜样品一次性通过高低温试验、恒定湿热试验以及重度磨擦试验等。试验结果表明,膜层致密性和表面机械性能良好,具备一定强度的防潮防腐能力和抗激光损伤阈值水平,可适应海洋环境光电窗口的应用需求。

Substact Sapphire is an excellent optical window material and can be widely used in aerospace and military field. it is greatly necessary for the research of VIS/NIR/MIR multispectral anti-reflective hard protective coatings on the sapphire substrate. In this paper, single layer without absorbance is researched, obtaining the optimal technical parameters through a great deal of ion-assisted deposition experiments and testings. A kind of new optical layer Si1-xOx with low index has been manufactured, and the problems of the layer thickness uniform and the layer stress have also been researched detailedly. At last, this kind of new optical coatings has been manufactured through many deposition experiments, The results show the average transmittance is higher than 95%. The sapphire window with developed anti-reflective film can be widely used in the optical systems with high performance, especially in navy field.