中国激光, 2018, 45 (1): 0103001, 网络出版: 2018-01-24
等离子体氮钝化GaSb材料表面特性研究 下载: 882次
Study on Surface Characteristics of GaSb Materials After Plasma Nitrogen Passivation
摘要
利用等离子体增强原子层沉积系统, 以逐层刻蚀方式对GaSb进行氮(N)钝化处理, 研究了钝化过程中刻蚀周期对GaSb钝化效果的影响。研究结果表明, 当刻蚀周期数为200时, 钝化效果最好; 刻蚀周期数不足(100)时, 钝化效果最弱; 刻蚀周期数较高(300~400)时, 随着刻蚀周期数的增大, 钝化效果减弱。
Abstract
The nitrogen passivation of GaSb by etching method layer by layer is conducted based on the plasma enhanced atomic layer deposition (PEALD) system, and the influence of etching cycle in the passivation process on the passivation effect of GaSb is discussed. The study results show that, the passivation effect is the best when the etching cycle number is 200. When the etching cycle number is smaller than 100, the passivation effect is the weakest. When the etching cycle is relatively higher (300-400), the larger the etching cycle number is, the weaker the passivation effect is.
刘晓敏, 房丹, 谷李斌, 方铉, 王登魁, 唐吉龙, 王新伟, 王晓华. 等离子体氮钝化GaSb材料表面特性研究[J]. 中国激光, 2018, 45(1): 0103001. Liu Xiaomin, Fang Dan, Gu Libin, Fang Xuan, Wang Dengkui, Tang Jilong, Wang Xinwei, Wang Xiaohua. Study on Surface Characteristics of GaSb Materials After Plasma Nitrogen Passivation[J]. Chinese Journal of Lasers, 2018, 45(1): 0103001.