首页 > 论文 > 激光技术 > 42卷 > 1期(pp:30-33)

基于光斑位置传感器的长导轨准直系统

Long guide rail alignment systems based on position sensitive detectors

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

为了检测长导轨的直线度, 采用激光作为参考基准线, 将2维光斑位置传感器作为光电转换器件。当固定在导轨滑块上的2维光斑位置传感器沿着导轨移动时, 光斑的位置数据会通过蓝牙模块传输到终端上, 输入位置信息之后, 软件会自动绘制出导轨的2维直线度曲线。结果表明, 计算出激光偏角带来的误差远小于1μm;通过高精度位移平台, 实验验证了系统的精度可达到3.4μm;实际使用中, 检测了7.2m的长导轨, 取得了长导轨的直线度数据, 重复精度可达5μm。这一结果对长导轨直线度测量的研究是有帮助的。

Abstract

In order to detect the long rail straightness, laser was used as the reference line, and 2-D position sensitive detector was used as photoelectric converter. When 2-D position sensitive detector was fixed on the guide rail slider and moved along the guide rail, the spot position data was transmitted to the terminal through bluetooth module. After entering the location information, the curve of 2-D straightness was drawn by the software automatically. The results show that, through theoretical analysis, the error of laser deflection angle is calculated and is less than 1μm. The system accuracy is verified by high-precision displacement platform experiment and reaches 3.4μm. In practical appliaction, a long rail of 7.2m is detected and the straightness data of long guide rail is obtained. The repeatability precision can reach 5μm. The study is helpful for straightness measurement of long rails.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:TH741

DOI:10.7510/jgjs.issn.1001-3806.2018.01.006

所属栏目:激光与光电子技术应用

收稿日期:2017-02-22

修改稿日期:2017-04-13

网络出版日期:--

作者单位    点击查看

罗 凯:华中科技大学 光学与电子信息学院, 武汉 430074
陈培锋:华中科技大学 光学与电子信息学院, 武汉 430074
王 英:华中科技大学 光学与电子信息学院, 武汉 430074

联系人作者:陈培锋(pfchen@hust.edu.cn)

备注:罗 凯(1993-), 男, 硕士研究生, 现主要从事光学电子器件的研究。

【1】WANG Y P. Research of flatness and linearity testing system[D].Shenyang: Shenyang University of Technology,2004: 9-38(in Chin-ese).

【2】YUE W L, WU Y. A fast evaluation method for flatness and straightness tolerance by means of incremental algorithm[J].Acta Metrologica Sinica, 2008, 29(2): 120-123(in Chinese).

【3】HUANG F G, CUI Ch C. Comparison of evaluating precision of straightness error between least square method and least envelope zone method[J].Optics and Precision Engineering, 2007, 15(6): 879-893(in Chinese).

【4】LI Y J, ZHENG Z G. Calculation of straightness error and computerization[J].China Measurement Technology,2007,33(3): 67-69(in Chinese).

【5】HU Zh X. Research on digitized evaluation theory and algorithm for the straightness error[D].Hunan: Hunan University,2012: 15-94(in Chinese).

【6】SONG Q. Research on straightness measurement system of long rails based on 2D-PSD[D]. Changchun: Changchun University of Science and Technology, 2014: 2-20(in Chinese).

【7】LI F. Study on straightness testing system of super-length guideway[D]. Changchun: Changchun University of Science and Technology, 2002: 2-15(in Chinese).

【8】L A M, WANG Zh X, HE A Zh, et al. Measuring the straightness of the long slideway using PSD[J].Journal of Transducer Technology,1996(5): 55-56(in Chinese).

【9】JIA T X, XU X P, DONG W B. Design of automatic testing system for 2-D position sensitive detector(PSD)[J]. Instrument Technique and Sensor,2012(10): 67-69(in Chinese).

【10】MA Ch G, YUAN H X, HE A Zh. Research of anti-jamming in facula orientation[J]. Laser Technology, 2002, 26(4): 308-310(in Chinese).

【11】MOU L N. Displacement detection system design based on PSD[D]. Taiyuan: North Central University, 2007: 2-30(in Chinese).

【12】LIU P, GAO L M, LE K D. Laser measurement system for rail linearity[J]. Laser Technology, 2009, 33(6): 575-578(in Chinese).

【13】HU Ch D, LI Y Q, Zh X,et al. Laser alignment measuring and testing equipment based on interference fringe[J]. Laser Technology, 2009, 33(5): 522-525(in Chinese).

【14】YANG Sh L, SU Y B, HE J T, et al. Study of measurement accuracy of position sensitive detectors[J]. Laser Technology, 2014, 38(6): 830-834(in Chinese).

【15】FENG Q B, LIANG J W. Development of a single mode fiber laser collimator[J]. Laser Technology, 1994, 18(6): 357-360(in Ch-inese).

【16】L A M, YUAN H X, HE A Zh. The research in the influence of beam spot on the precision of PSD[J]. Laser Technology, 1998, 22(5): 294-297(in Chinese).

【17】L A M, YUAN H X, HE A Zh. Experimental study of the effect of light source on position precision of PSD[J]. Laser Technology, 2000, 24(3): 192-195(in Chinese).

【18】FENG Q B, ZHANG B, KUANG C F. A straightness measurement system using a single-mode fiber-coupled laser module[J]. Optics & Laser Techology,2004,36(4): 279-283.

【19】SONG C, YENG Ch S. Linearity indices and linearity improvement of 2-D tetralateral position-sensitive detector[J]. IEEE Transactions on Electron Devices, September,2010,57(9): 2310-2316.

【20】LIU Ch, MA Y. Nonlinear correction of PSD with genetic algorithm based on neural network[J]. Journal of Electronic Measurement and Instrument,2015,29(8): 1157-1163(in Chinese).

【21】LIN Q S, YANG X J, WANG J X, et al. 2-D nonlinear correction in an improved BP neural network[J]. Laser Technology,2012,36(1): 124-130(in Chinese).

【22】LI Zh K, QIN Y Y. Research of on-line measurement and non-linearity correction of two dimention PSD device[J]. Laser Technology, 2004, 28(4): 370-372(in Chinese).

【23】EKINCI O, MAYER J R R. Relationships between straightness and angular kinematic errors in machines[J]. International Journal of Machine Tools & Manufacture, 2007,47(12/13): 1997-2004.

引用该论文

LUO Kai,CHEN Peifeng,WANG Ying. Long guide rail alignment systems based on position sensitive detectors[J]. Laser Technology, 2018, 42(1): 30-33

罗 凯,陈培锋,王 英. 基于光斑位置传感器的长导轨准直系统[J]. 激光技术, 2018, 42(1): 30-33

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF