激光与光电子学进展, 2018, 55 (2): 020006, 网络出版: 2018-09-10
光学相控阵技术研究进展 下载: 7389次
Research Progress of Optical Phased Array Technology
光学器件 光波导 光学相控阵 扫描角度 绝缘体上硅 optical devices optical waveguide optical phased array scanning angle silicon-on-insulator
摘要
论述了光学相控阵的原理,回顾了光学相控阵的发展历程,特别是近年来硅光子相控阵的研究进展。利用与互补金属氧化物半导体(CMOS)工艺线相兼容的绝缘体上硅(SOI)技术实现了大规模的集成,目前国外报道的最大的硅光子相控阵集成了4096个阵元。在硅光子上实现的二维光束扫描角度可以达到46°×36°,光束宽度只有0.85°×0.18°,天线的损耗小于3 dB,且旁瓣抑制大于10 dB。此外,采用微机电系统(MEMS)器件实现的光学相控阵的光束扫描速度超过0.5 MHz。阐述了各种方式实现光学相控阵的优缺点,并对未来发展前景进行了展望。最后,介绍了光学相控阵在激光雷达、成像、**上的应用。
Abstract
The principle of optical phased array is briefly discussed. The development of optical phased array is reviewed, especially the research progress of silicon photon phased array in recent years. Large-scale integration has been achieved by using silicon-on-insulator (SOI) technology compatible with complementary metal oxide semiconductor (CMOS) process lines. And the largest silicon photon phased array has been reported abroad, and its size is up to 4096 elements. The two-dimensional beam scanning angle achieved on silicon photons can reach 46°×36°, the beam width is only 0.85°×0.18°, the antenna loss is less than 3 dB, and the sidelobe suppression is greater than 10 dB. In addition, the steering speed of the optical phased array made of micro-electromechanical system (MEMS) devices is more than 0.5 MHz. Advantages and disadvantages of various methods to realize optical phased array are expounded, and the future development prospect is prospected. Finally, the applications of optical phased array in laser radar, imaging and military are introduced.
颜跃武, 安俊明, 张家顺, 王亮亮, 尹小杰, 吴远大, 王玥. 光学相控阵技术研究进展[J]. 激光与光电子学进展, 2018, 55(2): 020006. Yuewu Yan, Junming An, Jiashun Zhang, Liangliang Wang, Xiaojie Yin, Yuanda Wu, Yue Wang. Research Progress of Optical Phased Array Technology[J]. Laser & Optoelectronics Progress, 2018, 55(2): 020006.