激光与光电子学进展, 2018, 55 (4): 041301, 网络出版: 2018-09-11
偏振无关多齿谐振光栅反射镜的参数分析 下载: 765次
Parameters Analysis of Polarization Independent Reflector with Multi-Subpart Profile Resonant Grating
集成光学 偏振无关反射镜 亚波长多齿光栅 结构参数分析 integrated optics polarization independent reflector subwavelength multi-subpart profile grating structural parameter analysis
摘要
通过严格耦合波分析方法考察了宽带偏振无关多齿谐振光栅反射镜的工艺容差性。理论分析显示,在1.62~1.76 μm波段范围内,当微纳谐振光栅的周期和厚度、调制形状、中间层厚度及缓冲层厚度等关键结构参数变化20 nm时,其对器件反射谱的影响几乎可以忽略不计。该结果表明此结构在现有工艺误差范围内表现出比较好的工艺容差性,从而有利于该器件的加工制备。
Abstract
By using rigorous coupled-wave analysis method, the process tolerance of broadband polarization independent reflector with multi-subpart profile resonant grating is investigated. The theoretical analysis shows that, in the wavelength range of 1.62-1.76 μm, the change of 20 nm of critical structural parameters such as period and thickness, modulation profile, middle layer thickness, buffer thickness of micro-nano resonant grating has a negligible effect on the reflectance spectrum of the device. The results show that the proposed reflector has good processing tolerance in the existing processing error range, which is conducive to the processing and fabrication of the device.
吴华明, 肖文波, 肖永生, 黄丽贞, 段军红, 徐欢欢, 刘宪爽, 傅建平. 偏振无关多齿谐振光栅反射镜的参数分析[J]. 激光与光电子学进展, 2018, 55(4): 041301. Huaming Wu, Wenbo Xiao, Yongsheng Xiao, Lizhen Huang, Junhong Duan, Huanhuan Xu, Xianshuang Liu, Jianping Fu. Parameters Analysis of Polarization Independent Reflector with Multi-Subpart Profile Resonant Grating[J]. Laser & Optoelectronics Progress, 2018, 55(4): 041301.