激光与光电子学进展, 2018, 55 (4): 042201, 网络出版: 2018-09-11  

大面积高均匀度平行光曝光机用自由曲面复眼透镜设计 下载: 2115次

Design of Fly-Eye Lens with Free-Form Surface Used in Parallel Light Exposure Machine with Large Area and High Uniformity
作者单位
1 中国科学院重庆绿色智能技术研究院集成光电技术研究中心, 重庆 400714
2 中国科学院大学, 北京 100049
摘要
大面积平行光曝光机是印刷线路板(PCB)、显示面板和触摸屏等电子产品重要的制造设备,由于采用复眼结合反射镜的非轴对称科勒照明光路,其曝光均匀度只有0.85左右,难以满足高精度加工制造的需求。针对此问题,提出了采用自由曲面复眼替代传统的球面复眼,建立了高均匀度复眼单元的自由曲面面型设计方法。光线追迹仿真实验结果显示,采用所提方法后曝光均匀度提高到了0.91以上,满足高精度加工制造所需的高曝光均匀度的要求。所设计的自由曲面复眼的面型连续,可以通过金刚石车削进行精密加工,有望在大面积平行光曝光机照明光路中得到广泛应用。
Abstract
Parallel light exposure machine with large area is an important manufacturing equipment for electronic products such as printed circuit board (PCB), display panel, touch screen, and so on. Due to the use of non-axisymmetric Kohler illumination light path with fly-eye lens and a mirror, the uniformity of the exposure machine is only about 0.85, which cannot meet the needs of high-precision machining. Aiming at this problem, a fly-eye lens with free-form surface is proposed to replace traditional spherical fly-eye lens, and a free-form surface design method of high-uniformity fly-eye unit is established. The experimental results of ray tracing simulation analysis show that the exposure uniformity is improved to more than 0.91 by using the proposed method, which can meet the needs of high-precision machining. The designed fly-eye lens with free-form surface, which has continuous surface and can be machined by diamond turning, is expected to be widely used in the illumination path of parallel light exposure machine with large area.

陈忠雨, 尹韶云, 孙秀辉, 江海波, 杜春雷. 大面积高均匀度平行光曝光机用自由曲面复眼透镜设计[J]. 激光与光电子学进展, 2018, 55(4): 042201. Zhongyu Chen, Shaoyun Yin, Xiuhui Sun, Haibo Jiang, Chunlei Du. Design of Fly-Eye Lens with Free-Form Surface Used in Parallel Light Exposure Machine with Large Area and High Uniformity[J]. Laser & Optoelectronics Progress, 2018, 55(4): 042201.

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