首页 > 论文 > 激光与光电子学进展 > 55卷 > 5期(pp:51201--1)

光学面形绝对测量方法仿真和实验研究

Simulation and Experimental Study of Absolute Measurement Method for Optical Surface

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

传统光学干涉检测方法为相对检测法,检测精度一般受限于参考面面形精度,利用绝对检测技术可消除参考面面形误差对干涉测量精度的制约, 从而可以实现纳米级精度的面形测量。首先介绍了N位旋转平均绝对检测方法和斜入射绝对检测方法;然后对这两种检测方法和面形恢复过程中运用到的三种算法(旋转平均算法、迭代算法、奇偶函数算法)进行了理论推导和模拟仿真分析;最后通过实验验证了这三种方法恢复的面形精度及其可行性,并对各方法的优缺点和适用性进行了分析比较。最终实现了100 mm口径平面镜峰谷(PV)值近λ/40的高精度干涉仪标准平晶绝对面形的测量。

Abstract

The traditional optical interference measurement method is relative detection method, and the detection accuracy is generally limited by the accuracy of the reference surface shape. The use of absolute detection technology can eliminate the constraint of the reference surface shape error on the interference measurement accuracy, which can realize the measurement of the surface shape in nanoscale. Firstly, N bit rotation average absolute detection method and oblique incidence absolute detection method are introduced. Then the theoretical derivation and simulation analysis of two detection methods and three algorithms (rotation average algorithm, iteration algorithm, odd even function algorithm) used in the process of surface restoration are carried out. Finally, the recovered surface shape accuracy and feasibility of the three methods are verified by the experiments. The advantage, disadvantage and applicability of each method are analyzed and compared. At last, the absolute surface measurement of mirror with aperture of 100 mm for high precision interferometer standard flat with peak valley (PV) value of nearly λ/40 is achieved.

广告组1 - 空间光调制器+DMD
补充资料

中图分类号:O439

DOI:10.3788/LOP55.051201

所属栏目:仪器,测量与计量

基金项目:国家自然科学基金(11602280)

收稿日期:2017-10-19

修改稿日期:2017-12-01

网络出版日期:--

作者单位    点击查看

孟诗:南京理工大学电子工程与光电技术学院, 江苏 南京 210094中国科学院上海光学精密机械研究所强激光材料重点实验室, 上海 201800
刘世杰:中国科学院上海光学精密机械研究所强激光材料重点实验室, 上海 201800
陈磊:南京理工大学电子工程与光电技术学院, 江苏 南京 210094
周游:中国科学院上海光学精密机械研究所强激光材料重点实验室, 上海 201800
白云波:中国科学院上海光学精密机械研究所强激光材料重点实验室, 上海 201800

联系人作者:孟诗(470244873@qq.com)

备注:孟诗(1993-),女,硕士研究生,主要从事光学干涉测量技术方面的研究。E-mail: 470244873@qq.com

【1】Schulz G, Schwider J. Precise measurement of plainness[J]. Applied Optics, 1967, 6(6): 1077-1084.

【2】Schulz G. Absolute flatness testing by an extended rotation method using two angles of rotation[J]. Applied Optics, 1993, 32 (7): 1055-1059.

【3】Fritz B S. Absolute calibration of an optical flat[J]. Optics Engineering, 1984, 23(4): 379-383.

【4】Ai C, Wyant J C. Absolute testing of flats decomposed to even and odd function[C]. SPIE, 1992, 1776: 73-83.

【5】Evans C J, Kestner R N. Test optics error removal [J].Applied Optics, 1996, 35(7): 1015-1021.

【6】Jia X, Xing T W, Wei H M, et al. Analysis and simulation of absolute test of flats decomposed to even and odd functions[J]. Infrared and Laser Engineering, 2012, 41(2): 500-505.
贾辛, 邢廷文, 魏豪明, 等. 采用奇偶函数法的平面面形绝对测量技术仿真分析[J]. 红外与激光工程, 2012, 41(2): 500-505.

【7】Küchel M F. A new approach to solve the three flat problem[J]. Optik-International Journal for Light and Electron Optics, 2001, 112(9): 381-391.

【8】Griesmann U. Three-flat test solution based on simple mirror symmetry[J]. Applied Optics, 2006, 45(23): 5856-5865

【9】Vannoni M. Absolute flatness measurement using oblique incidence setup and an iterative algorithm[J]. Optics Express, 2014, 22(3): 3538-3546.

【10】Liu H H. Study of absolute measurement method of optical plane based on rotating in N positions[D]. Nanjing: Nanjing University of Science and Technology, 2016.
刘欢欢. 基于N位旋转测量的光学平面绝对检测技术研究[D]. 南京: 南京理工大学, 2016.

【11】Yang L L. Measurement of diffraction efficiency for multi-layer diffractive optical elements with oblique incidence[J]. Acta Optica Sinica, 2017, 37(2): 0205003.
杨亮亮. 多层衍射光学元件斜入射衍射效率的测量[J]. 光学学报, 2017, 37(2): 0205003.

【12】Xu L B, Zhou Y, Zhu R H, et al. Research progress of wavefront error detection technology for meter-size optical elements in inertial confinement fusion system[J]. Laser & Optoelectronic Progress, 2016, 53(12): 120001.
徐隆波, 周游, 朱日宏, 等. 惯性约束聚变系统中米量级光学元件波面误差检测技术研究进展[J]. 激光与光电子学进展, 2016, 53(12): 120001.

【13】Shi Y P, Liu C L. Positioning accuracy improvement of spot centroid for Shack-Hartmann wavefront sensor[J].Laser & Optoelectronic Progress, 2017, 54(8): 081201.
师亚萍, 刘缠牢. 提高夏克-哈特曼波前传感器光斑质心的定位精度[J]. 激光与光电子学进展, 2017, 54(8): 081201.

【14】Xiang Y, Li K Y, Wang W, et al. Analysis of surface distortion of large aperture ultra-thin crystals and exploration of new clamping method with low stress[J]. Chinese Journal of Lasers, 2017, 44(2): 0208001.
向勇, 李恪宇, 王伟, 等. 大口径超薄晶体的面形畸变分析和低应力新型夹持方法探索[J]. 中国激光,2017, 44(2): 0208001.

【15】Liu X M. Absolute testing of the optical flatness[D]. Nanjing: Nanjing University of Science and Technology, 2004.
刘晓梅. 光学平面的绝对检测[D]. 南京: 南京理工大学, 2004.

引用该论文

Meng Shi,Liu Shijie,Chen Lei,Zhou You,Bai Yunbo. Simulation and Experimental Study of Absolute Measurement Method for Optical Surface[J]. Laser & Optoelectronics Progress, 2018, 55(5): 051201

孟诗,刘世杰,陈磊,周游,白云波. 光学面形绝对测量方法仿真和实验研究[J]. 激光与光电子学进展, 2018, 55(5): 051201

被引情况

【1】王云涛,陈磊,孔璐,杨光,胡晨辉. 基于奇偶函数和Fourier级数的三球面法绝对检验. 中国激光, 2019, 46(11): 1104001--1

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF