首页 > 论文 > 激光与光电子学进展 > 55卷 > 5期(pp:51602--1)

ITO薄膜表面等离子体共振波长的可控调节

Controllable Modulation of Surface Plasmon Resonance Wavelength of ITO Thin Films

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

采用直流磁控溅射的方式,在浮法玻璃衬底上制备了氧化铟锡(ITO)薄膜。通过改变薄膜沉积时间,制备出不同厚度的ITO薄膜。随着膜厚由16 nm逐渐增大到271 nm,其结晶程度得到增强,对应的载流子浓度由4.79×1020 cm-3增大到2.41×1021 cm-3,表面等离子体共振(SPR)波长由1802 nm逐渐蓝移到1204 nm,实现了近红外区域SPR波长较宽范围的可控调节。采用Drude自由电子气模型,对不同厚度ITO薄膜的SPR波长进行了理论计算,进一步证明了SPR波长的有效调节取决于膜厚对载流子浓度的影响作用。

Abstract

The tin-doped indium oxide (ITO) thin films are fabricated on the float glass substrates by the direct current (DC) magnetron sputtering method. The ITO thin films with different thicknesses are fabricated by changing the deposition time. As the film thickness gradually increases from 16 nm to 271 nm, the crystallinity is enhanced and the corresponding carrier concentration is increased from 4.79×1020 cm-3 to 2.41 ×1021 cm-3. Thus the corresponding surface plasmon resonance (SPR) wavelength blueshifts from 1802 nm to 1204 nm. The controllable modulation of near infrared SPR wavelength within a relatively broad range is realized. The SPR wavelength of the ITO films with different film thicknesses are theoretically calculated by using the Drude free electron gas model, which further confirms that the effective modulation of SPR wavelength is determined by the influence of film thickness on carrier concentration.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:O531

DOI:10.3788/lop55.051602

所属栏目:材料

基金项目:国家自然科学基金(61404009)、吉林省科技发展计划(20170520118JH)、长春理工大学校创 新基金(XJJLG-2016-11)

收稿日期:2018-01-12

修改稿日期:2018-01-17

网络出版日期:--

作者单位    点击查看

蔡昕旸:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
王新伟:长春理工大学材料科学与工程学院, 吉林 长春 130022
李如雪:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
王登魁:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
方铉:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
房丹:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
张玉苹:吉林大学理论化学研究所超分子结构与材料国家重点实验室, 吉林 长春 130022
孙秀平:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
王晓华:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
魏志鹏:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022

联系人作者:王新伟(wxw4122@cust.edu.cn)

备注:蔡昕旸(1994-),女,硕士研究生,主要从事纳米材料与低维物理方面的研究。E-mail: 978784701@qq.com

【1】Lu D, Liu Z. Hyperlenses and metalenses for far-field super-resolution imaging[J]. Nature Communications, 2012, 3(6): 1205.

【2】Kaur G, Yadav K L, Mitra A.Localized surface plasmon induced enhancement of electron-hole generation with silver metal island at n-Al∶ZnO/p-Cu2O heterojunction[J]. Applied Physics Letters, 2015, 107(5): 053901.

【3】Dou X J, Min C J, Zhang Y Q, et al. Surface plasmon polaritons optical tweezers technology[J]. Acta Optica Sinica, 2016, 36(10): 1026004.
豆秀婕, 闵长俊, 张聿全, 等. 表面等离激元光镊技术[J]. 光学学报, 2016, 36(10): 1026004.

【4】Hao D, Hu C, Grant J, et al. Hybrid localized surface plasmon resonance and quartz crystal microbalance sensor for label free biosensing[J]. Biosensors and Bioelectronics, 2018, 100: 23-27.

【5】Barnes W L, Dereux A, Ebbesen T W. Surface plasmon subwavelength optics[J]. Nature, 2003, 424(6950): 824-830.

【6】Guo Q B, Liu X F, Qiu J R. Research progress of ultrafast nonlinear optics and applications of nanostructures with localized plasmon resonance[J]. Chinese Journal of Lasers, 2017, 44(7): 0703005.
郭强兵, 刘小峰, 邱建荣. 局域表面等离子体纳米结构的超快非线性光学及其应用研究进展[J]. 中国激光, 2017, 44(7): 0703005.

【7】Li T, Chen J, Zhu S N. Manipulating surface plasmon propagation: From beam modulation to near-field holography[J]. Laser & Optoelectronics Progress, 2017, 54(5): 050002.
李涛, 陈绩, 祝世宁. 表面等离激元的传播操控: 从波束调制到近场全息[J]. 激光与光电子学进展, 2017, 54(5): 050002.

【8】Kanehara M, Koike H, Yoshinaga T, et al. Indium tin oxide nanoparticles with compositionally tunable surface plasmon resonance frequencies in the near-IR region[J]. Journal of the American Chemical Society, 2009, 131(49): 17736-17737.

【9】Zhang B X, Chen S F, Fu L, et al. Dynamic patterning of microparticles via surface plasmon excitation[J].Chinese Journal of Lasers, 2012, 39(6): 0610001.
张兵心, 陈淑芬, 付雷, 等. 基于表面等离子体激发的光学操控技术[J]. 中国激光, 2012, 39(6): 0610001.

【10】Jia R, Lin G, Zhao D, et al. Sandwich-structured Cu2O photodetectors enhanced by localized surface plasmon resonances[J]. Applied Surface Science, 2015, 332: 340-345.

【11】Bai Y, Gao C, Yin Y. Fully alloyed Ag/Au nanorods with tunable surface plasmon resonance and high chemical stability[J]. Nanoscale, 2017, 9(39): 14875-14880.

【12】You J B, Zhang X W, Dong J J, et al. Localized-surface-plasmon enhanced the 357 nm forward emission from ZnMgO films capped by Pt nanoparticles[J]. Nanoscale Research Letters, 2009, 4(10): 1121-1125.

【13】Wang Y, Wang X, Li L W. Properties of light trapping of thin film solar cell based on surface plasmon polaritons[J]. Laser & Optoelectronics Progress, 2015, 52(9): 092401.
王玥, 王暄, 李龙威. 基于表面等离激元薄膜太阳能电池陷光特性的研究[J]. 激光与光电子学进展, 2015, 52(9): 092401.

【14】Gao J. Investigation of siliver nanoparticle films in plasmonics for use as fluorescence enhancement of RH6G molecules[J]. Laser & Optoelectronics Progress, 2015, 52(6): 061601.
高俊. Ag纳米薄膜的等离激元对RH6G分子的荧光增强研究[J]. 激光与光电子学进展, 2015, 52(6): 061601.

【15】Karasawa T, Miyata Y. Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by dc reactive sputtering[J]. Thin Solid Films, 1993, 223(1): 135-139.

【16】Zeng W Q, Yao J K, He H B, et al. Influence of substrate temperature on the properties of tin-doped indium oxide thin films prepared by direct current magnetron sputtering[J]. Chinese Journal of Lasers, 2008, 35(12): 2031-2035.
曾维强, 姚建可, 贺洪波, 等. 基底温度对直流磁控溅射ITO透明导电薄膜性能的影响[J]. 中国激光, 2008, 35(12): 2031-2035.

【17】Zhang Y H, Guo W L, Qin Y, et al. Effects of ITO on proprieties of novel AlGaInP red LED[J]. Acta Optica Sinica, 2010, 30(8): 2401-2405.
张勇辉, 郭伟玲, 秦园, 等. ITO对新型AlGaInP红光LED特性的影响[J]. 光学学报, 2010, 30(8): 2401-2405.

【18】Boltasseva A, Atwater H A. Low-loss plasmonic metamaterials[J]. Science, 2011, 331(6015): 290-291.

【19】Brewer S H, Franzen S. Indium tin oxide plasma frequency dependence on sheet resistance and surface adlayers determined by reflectance FTIR spectroscopy[J]. The Journal of Physical Chemistry B, 2002, 106(50): 12986-12992.

【20】Kamakura R, Fujita K, Murai S, et al. Controlling plasmonic properties of epitaxial thin films of indium tin oxide in the near-infrared region[J]. Journal of Physics, 2015, 619(1): 012056.

【21】Fang X, Mak C L, Zhang S, et al. Pulsed laser deposited indium tin oxides as alternatives to noble metals in the near-infrared region[J]. Journal of Physics: Condensed Matter, 2016, 28(22): 224009.

【22】Tuo Y F, Wu Y P, Huang M, et al. The surface plasmon resonance absorption of indium tin oxide nanoparticles and its control[J]. Advanced Materials Research, 2015, 1118: 160-165.

【23】Hao L, Diao X, Xu H, et al. Thickness dependence of structural, electrical and optical properties of indium tin oxide (ITO) films deposited on PET substrates[J]. Applied Surface Science, 2008, 254(11): 3504-3508.

【24】West P R, Ishii S, Naik G V, et al. Searching for better plasmonic materials[J]. Laser & Photonics Reviews, 2010, 4(6): 795-808.

【25】Gao M Z, Job R, Xue D S, et al. Thickness dependence of resistivity and optical reflectance of ITO films[J]. Chinese Physics Letters, 2008, 25(4): 1380-1383.

引用该论文

Cai Xinyang,Wang Xinwei,Li Ruxue,Wang Dengkui,Fang Xuan,Fang Dan,Zhang Yuping,Sun Xiuping,Wang Xiaohua,Wei Zhipeng. Controllable Modulation of Surface Plasmon Resonance Wavelength of ITO Thin Films[J]. Laser & Optoelectronics Progress, 2018, 55(5): 051602

蔡昕旸,王新伟,李如雪,王登魁,方铉,房丹,张玉苹,孙秀平,王晓华,魏志鹏. ITO薄膜表面等离子体共振波长的可控调节[J]. 激光与光电子学进展, 2018, 55(5): 051602

被引情况

【1】郭德双,陈子男,王登魁,唐吉龙,方铉,房丹,林逢源,王新伟,魏志鹏. 退火温度对铝掺杂氧化锌薄膜晶体质量及光电性能的影响. 中国激光, 2019, 46(4): 403002--1

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF