为了探讨激光表面微织构加工技术对氧化铝陶瓷和氮化硅陶瓷凹槽型表面微织构的制备能力, 采用短脉冲皮秒激光器探究平均功率、扫描速度、重复次数等工艺参数对表面织构结构形貌和质量的影响。结果表明: 氧化铝陶瓷在功率8.3 W, 扫描速度800 mm/s, 重复次数10次时, 凹槽呈U型,加工效果较好; 氮化硅陶瓷在功率40.6 W, 扫描速度800 mm/s, 重复次数10次时加工效果较好, 且皮秒激光对氧化铝陶瓷的加工效率高于氮化硅陶瓷。氮化硅陶瓷加工凹槽底部有白色氧化物层产生, 对氮化硅凹槽形貌有较大影响。

In order to investigate the preparation ability of groove surface micro texture for laser surface texturing processing technology of alumina ceramic and silicon nitride ceramic, the effects of average power, scanning speed, repetition number and other process parameters on the surface texture morphology and quality were analyzed with short pulse picosecond laser. The results show that when using the power of 8.3 W, scanning speed of 800 mm/s, and repetition of 10 times, the groove is U-shaped and better processing effect of the alumina ceramics could be obtained; while processing effects of silicon nitride ceramic is better under the power of 40.6 W, scanning speed of 800 mm/s, and repetition of 10 times. The processing efficiency of picosecond laser for alumina ceramics is higher than that of silicon nitride ceramics. There is a white oxide layer at the bottom of the groove of the silicon nitride ceramics, which has a great influence on the morphology of the silicon nitride groove.