局域表面等离子体共振是一种改善光电探测器性能的有效方法。本文为了提高beta-氧化镓(β-Ga₂O₃)薄膜金属-半导体-金属(MSM)日盲紫外探测器的性能，提出了在beta-氧化镓薄膜表面利用快速热退火的方法形成分散的铝纳米粒子(Al-NPs)，增强薄膜对光的吸收。运用此方法制备的Al-NPs/β-Ga₂O₃探测器不仅降低了暗电流，同时也提升了光响应度和探测率。在波长254 nm 紫外光照、10 V 偏压下，该器件的光响应度达到了2.7 A/W，探测率达到了1.35′1014 cm×Hz^1/2×W^-1，与β-Ga₂O₃探测器相比，分别提升了1.5倍和2倍。

Localized surface plasmon resonance (LSPR) provides an effective approach to further improve the performance of photodetectors. In this work, we introduce the Al nanoparticles (Al-NPs) on the surface of β-Ga₂O₃ thin film by rapid thermal annealing in order to improve the performance of β-Ga₂O₃ solar-blind ultraviolet photodetectors Al nanoparticles arrays, which can not only decrease the dark current but also enhance the responsivity and specific detectivity. As a result, the responsivity of β-Ga₂O₃-based metal-semiconductor-metal (MSM) solar-blind ultraviolet photodetectors with Al-NPs can reach 2.7 A/W, and the specific detectivity can reach 1.35′1014 cm×Hz^1/2×W^-1 under the 254 nm radiation and 10 V bias. Both parameters are more than 1.5 times and 2 times higher than those without Al nanoparticles, respectively.