中国激光, 2018, 45 (5): 0504001, 网络出版: 2018-05-21   

面向激光追踪测量系统二维回转轴系的误差分析及精度保证 下载: 661次

Error Analysis and Accuracy Assurance of Two-Dimensional Rotatory Axes for Laser Tracing Measurement System
作者单位
北京工业大学北京市精密测控技术与仪器工程技术研究中心, 北京 100124
摘要
为实现对数控装备测量精度的快速检测, 面向激光追踪测量系统设计了一套二维万向节式回转轴系。将高精度标准球作为反射单元固定安装在基座上, 保证了激光追踪测量系统具有较大的跟踪角度, 同时避免了轴系回转时的窜动和游动对测量结果的影响。分析了轴系结构中主要几何误差对激光追踪测量系统测量精度的影响, 研究了轴系跳动误差与测量精度的关系, 并简化了轴系跳动误差模型。实验结果表明, 当轴系跳动误差在±5 μm以内时, 由该误差引起的激光追踪测量系统的测量误差不足0.1 μm, 保证了激光追踪测量系统具有消除跳动误差影响的能力。
Abstract
In order to realize rapid detection of measurement accuracy of numerical control equipments, a set of two-dimensional gimbal mount rotatory axes is designed for laser tracing measuring system. A high precision reference sphere serves as the reflection unit, and it is fixed on the base, which ensures laser tracing measuring system perform in a large tracking angle and avoids the influence on measurement accuracy caused by the movement of rotatory axes. The effect of the main geometric errors of axes on measurement accuracy of laser tracing measuring system is analyzed. The relation between run-out error of axes and measurement accuracy is studied, and the model of run-out error of axes is simplified. Experimental results show that measurement error of the laser tracing measuring system is less than 0.1 μm when the run-out error is within the range of ±5 μm, which indicates that the laser tracing measuring system can reduce the effect of run-out error.

宋辉旭, 石照耀, 陈洪芳, 孙衍强. 面向激光追踪测量系统二维回转轴系的误差分析及精度保证[J]. 中国激光, 2018, 45(5): 0504001. Song Huixu, Shi Zhaoyao, Chen Hongfang, Sun Yanqiang. Error Analysis and Accuracy Assurance of Two-Dimensional Rotatory Axes for Laser Tracing Measurement System[J]. Chinese Journal of Lasers, 2018, 45(5): 0504001.

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