为了提高石英玻璃对普通脉冲红外激光的吸收效率, 用钡化合物粉体覆盖层辅助1064nm红外激光刻蚀石英玻璃, 采用能谱仪和X射线衍射分别对BaCrO4,BaCl2和Ba(OH)2粉体覆盖层辅助激光刻蚀石英玻璃得到的刻槽底面刻蚀产物进行了测试和分析, 对3种刻蚀方法的刻蚀机理进行了理论分析和实验验证。结果表明, BaCrO4和Ba(OH)2粉体的刻蚀机理都存在化学反应去蚀石英玻璃的作用, 二者去蚀率都较高; BaCl2粉体的刻蚀过程中无化学反应起到去蚀作用, 去蚀率低下。这一结果对激光加工石英玻璃的工业应用提供技术基础。

In order to improve the absorption efficiency of ordinary pulsed infrared laser for fused silica, a new method for 1064nm infrared laser etching fused silica assisted by barium compound powder coating was proposed. The etching products adhering to the surface of the groove etched by laser assisted by BaCrO4, BaCl2, and Ba(OH)2 powder coating were tested and analyzed by means of energy dispersive spectrometer (EDS) and X-ray diffraction (XRD) respectively. The results show that the etching mechanisms of BaCrO4 and Ba(OH)2 powder have the chemical reaction to remove quartz glass and the corrosion rates are high. The etching mechanism of BaCl2 powder has no chemical reaction to remove quartz glass and the corrosion rate is low. The study provides the technical basis for the industrial application of laser processing fused silica.