中国光学, 2018, 11 (2): 190, 网络出版: 2018-05-29
采用BCB平整技术的高速850 nm垂直面发射激光器
High-speed 850 nm vertical-cavity surface-emitting lasers with BCB planarization technique
垂直腔面发射激光器 高速调制 苯并环丁烯平整技术 vertical-cavity surface-emitting laser high-speed modulation benzocyclobutene(BCB) planarization technique
摘要
垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势, 广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯(BCB)平整技术有效地降低了垂直腔面发射激光器的寄生电容。详细研究了BCB平整技术的最优工艺参数, 为未来高速垂直腔面发射激光器的制造技术提供参考。低k值BCB平整垂直腔面发射激光器在7 μm氧化孔径下3 dB小信号调制带宽可达152 GHz。
Abstract
Vertical-cavity surface-emitting lasers(VCSELs) are widely used in short-reached optical interconnects and data communication links because of their low energy consumption and high modulation speed. Capacitance, as the parasitic parameters, affects the modulation bandwidth. In this paper, parasitic capacitance of VCSELs is reduced by using a low-k benzocyclobutene(BCB) planarization technique. The detail BCB planarization technique has been discussed with optimal process parameters, which is useful for high-speed VCSEL fabrication. The small signal modulation bandwidth of the low-k BCB planarization VCSEL with 7 μm oxide aperture has been achieved to 152 GHz.
何晓颖, 董建, 胡帅, 何艳, 吕本顺, 栾信信, 李冲, 胡安琪, 胡宗海, 郭霞. 采用BCB平整技术的高速850 nm垂直面发射激光器[J]. 中国光学, 2018, 11(2): 190. 何晓颖, 董建, 胡帅, 何艳, 吕本顺, 栾信信, 李冲, 胡安琪, 胡宗海, 郭霞. High-speed 850 nm vertical-cavity surface-emitting lasers with BCB planarization technique[J]. Chinese Optics, 2018, 11(2): 190.