半导体光电, 2018, 39 (3): 414, 网络出版: 2018-06-29
大口径细光束自准直测量系统的误差源分析
Analysis of Error Source for Large Aperture Thin Beam Autocollimating Measurement System
摘要
为了满足自准直系统的高精度要求, 同时扩展其适用范围, 以便更好地应用于科学研究, 在光学自准直原理的基础上, 针对大口径细光束的自准直系统进行研究, 并对其误差源做了深入分析。对入射光束发散度引入的误差、CCD离焦误差、光学元件姿态引入的误差、反射镜平面度误差、准直系统瞄准误差以及原理误差这六种主要的误差源做了定量分析, 同时对外界环境条件引入的误差进行了定性分析。通过对上述误差的定量与定性分析, 可以直观地观察各误差源对系统精度产生的影响, 为后续大口径细光束自准直系统的设计提供了重要的理论支持。
Abstract
In order to meet the highprecision requirement of autocollimating system and expand its application scope, the error sources in large aperture thin beam autocollimating system were analyzed based on the principle of autocollimating in detail. The errors introduced by the incident beam divergence and CCDs defocus, the error introduced by the optical element states, the mirror flatness error, the aiming error and the principle error were quantitatively analyzed. And also the error introduced by external environment was analyzed qualitatively. Through the quantitative and qualitative analysis, the influence of each error source on the system precision is presented, which will provide important theoretical support for system design.
赵玉平, 彭川黔, 王劼. 大口径细光束自准直测量系统的误差源分析[J]. 半导体光电, 2018, 39(3): 414. ZHAO Yuping, PENG Chuanqian, WANG Jie. Analysis of Error Source for Large Aperture Thin Beam Autocollimating Measurement System[J]. Semiconductor Optoelectronics, 2018, 39(3): 414.