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一种基于激光调制的高精度位移测量方法

High-precision displacement measurement method based on laser modulation

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摘要

激光准直技术在位移测量及相关应用中具有重要作用, 其核心器件是位置敏感探测器, 环境杂散光、电源波动、光电信号处理电路噪声等是影响测量精度的主要因素。针对以上问题, 提出一种基于激光调制的高精度位移测量方法。将激光器由直流驱动的连续输出模式改为交流驱动的调制模式输出, 优化设计光电探测器微弱光电信号的调理与采集系统, 通过编写Labview软件对信号进行频谱分析、带通滤波、均值处理等, 对激光连续输出和激光调制输出2种情况分别进行了实验测试与分析, 并对比了位移测量的稳定性。实验结果表明: 其测量值波动范围从7 μm减少到了2.6 μm, 验证了基于激光调制方法的有效性, 可以通过滤波更加有效地消除噪声, 测量精度提高至3 μm以内。

Abstract

The displacement measurement system based on laser collimation technology has been used in many fields. The core device of measurement system is the position sensitive detector. Such as stray light, power fluctuation and noise of photoelectric signal processing circuit, these factors can affect the measurement accuracy. To solve these problems, a high-precision displacement measurement method based on laser modulation was presented. Laser was operated in a modulation mode, instead of continuous laser mode. A photoelectric signal processing circuit was designed and optimized, and a program based on Labview was designed to implement the functions such as spectrum analysis, bandpass filtering and mean processing. Through the experiments and analysis, the measurement stability of two methods was compared. The experimental results show that the fluctuation of measurement results decreases from 7 μm to 2.6 μm,The effectiveness of laser modulation was verified, which can reduce the noise effectively by filtering and improve the measurement accuracy within 3 μm.

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中图分类号:TN247

DOI:10.5768/jao201839.0203004

所属栏目:光学计量与测试

收稿日期:2017-09-22

修改稿日期:2017-11-09

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作者单位    点击查看

翟玉生:郑州轻工业学院 物理与电子工程学院, 河南 郑州 450002
蒋留杰:郑州轻工业学院 机电工程学院, 河南 郑州 450002
王新杰:郑州轻工业学院 机电工程学院, 河南 郑州 450002
张志峰:郑州轻工业学院 物理与电子工程学院, 河南 郑州 450002
刘佳明:郑州轻工业学院 物理与电子工程学院, 河南 郑州 450002

联系人作者:翟玉生(hf_sy@sohu.com)

备注:翟玉生(1974-), 男, 辽宁沈阳人, 博士, 副教授, 硕士生导师, 主要从事光电检测技术方面的研究。

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引用该论文

Zhai Yusheng,Jiang Liujie,Wang Xinjie,Zhang Zhifeng,Liu Jiaming. High-precision displacement measurement method based on laser modulation[J]. Journal of Applied Optics, 2018, 39(2): 230-234

翟玉生,蒋留杰,王新杰,张志峰,刘佳明. 一种基于激光调制的高精度位移测量方法[J]. 应用光学, 2018, 39(2): 230-234

被引情况

【1】翟玉生,柳文龙,王新杰,谢泽铧,闫赛赛,郭逸航. 激光准直测量中的光漂补偿方法. 激光与光电子学进展, 2019, 56(7): 71203--1

【2】傅勤毅,周遵梅,金鼎沸,王鸿飞. 三角波调制在激光测距中的应用研究. 中国激光, 2020, 47(3): 304006--1

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