光学学报, 2018, 38 (8): 0815021, 网络出版: 2018-09-06
基于不等占空比二元光栅的相位测量轮廓术 
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Phase Measurement Profilometry Based on Binary Gratings with Unequal Duty Cycle
机器视觉 三维测量 二元光栅 不等占空比 滤波 相位测量轮廓术 machine vision three dimensional measurement binary grating unequal duty cycle filter phase measurement profilometry
摘要
提出了一种基于不等占空比二元光栅的相位测量轮廓术(PMP)。所用的光栅只有0和255两个灰度,消除了投影仪的伽玛非线性对正弦光栅灰度的影响,同时可将投影系统的刷新频率提高一个数量级。所提方法的测量精度高于罗奇光栅离焦投影傅里叶变换轮廓术的,重复精度高于传统正弦光栅PMP。
Abstract
The phase measurement profilometry (PMP) based on binary gratings with an unequal duty cycle is proposed. The adopted binary gratings have only two grayscales of 0 and 255, and the effect of the gamma nonlinearity on the grayscale of the sinusoidal grating is eliminated. At the same time, the refresh frequency of the projection system can be increased by an order of magnitude. The measurement accuracy of this proposed method is higher than that of the Roach grating defocus projection Fourier transform profilometry and the repeat accuracy is higher than that of the traditional PMP based on sinusoidal gratings.
陈雨婷, 曹益平, 陈澄, 万莹莹, 付光凯, 王亚品, 王璐. 基于不等占空比二元光栅的相位测量轮廓术[J]. 光学学报, 2018, 38(8): 0815021. Yuting Chen, Yiping Cao, Cheng Chen, Yingying Wan, Guangkai Fu, Yapin Wang, Lu Wang. Phase Measurement Profilometry Based on Binary Gratings with Unequal Duty Cycle[J]. Acta Optica Sinica, 2018, 38(8): 0815021.
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