为实时监测高通量激光系统中洁净情况，提出了基于微纳光纤的微量污染物传感技术。为消除微纳光纤外形结构误差对测试结果影响，首先理论研究了微纳光纤拉制过程，得到了加热长度和拉伸长度误差和引入微纳光纤外形结构偏差的关系，接着通过理论仿真得到了不同拉制参数条件下，微纳光纤外形结构误差情况，并得到了拉制长度为10 mm、直径为1.5 μm的最优制备参数，最后通过实测微纳光纤外形结构验证了理论仿真结果。实验结果表明，通过优化微纳光纤拉制参数可实现其外形结构的精细控制，为微纳光纤用于微量污染物传感工程实用化奠定基础。

To monitor the environment in high peak laser system inline, the method to sense containments by using optical microfiber(OM) was proposed. To realize precise control of the OM diameter, we firstly analyzed the OM fabrication process, obtained the relationship between the deviation of the OM shape and the errors of heating length and stretching length, then simulated the deviation in different situation, finally got the optimal parameter to fabricate OM with the length of 10 mm and the diameter of 1.5 μm. We have proved the simulation results by measuring the shape of the drawn OMs. According to our research, precise control of OM shape can be achieved by tuning the OM fabrication parameters, and the results lay the foundation for practical application of OM contaminants sensor.