研究了射频板条CO2激光器光束整形系统球面镜横向位移失调和角度失调对输出光束光强分布的影响。研究表明, 横向位移失调情况下, 输出光束对非稳方向的失调更加敏感, 波导方向失调对输出光束光强分布基本无影响。非稳方向横向位移失调达到0.1 mm时, 光强分布由圆形分布变为类似椭圆分布, 光强峰值也不在中心区域。角度失调情况下, 波导方向相对敏感。非稳方向失调角度仅为0.05°时, 光强分布就已经见明显的畸变。波导方向的角度失调达到0.5°时, 光束有明显的位移, 会对功率造成影响。

The influence of the lateral displacement and angular misalignment of the spherical mirror of the RF slab CO2 laser beam shaping system on the intensity distribution of the output beam is studied. Studies have shown that under the condition of lateral misalignment, the output beam is more sensitive to the misalignment of the unstable direction, and the misalignment of the waveguide direction has minimal effect on the intensity distribution of the output beam. When the lateral displacement misalignment in the unstable direction is up to 0.1 mm, the intensity distribution changes from a circular distribution to an elliptical distribution, and the peak intensity is not in the central area. In the case of misalignment, the direction of the waveguide is relatively sensitive. When the misalignment angle of the unstable direction is only 0.05°, the light intensity distribution has already seen obvious distortion. When the angle misalignment of the waveguide direction reaches 0.5°, the light beam has a significant displacement and affects the output power.