光子学报, 2018, 47 (5): 0516003, 网络出版: 2018-09-07
柔性SrTiO3/Ag/SrTiO3复合结构透明导电薄膜的制备和性能研究
Preparation and Investigation of Flexible SrTiO3/Ag/SrTiO3 Multilayer Transparent Conductive Thin Films
薄膜 光学材料 磁控溅射沉积 透明导电薄膜 柔性 Thin films Optical materials Magnetron sputtering deposition Transparent conductive films Flexible
摘要
为获得高性能的柔性透明导电薄膜, 采用磁控溅射技术在柔性PC衬底上制备出了STO (30 nm)/Ag/STO (30 nm)复合结构透明导电薄膜.分别对不同中间Ag层厚度薄膜的结构、光学和电学性质进行了研究.研究发现:随着中间Ag层厚度的增加, 可见光区的平均透过率先增大后减小, 电阻率和方块电阻持续减小; 当中间Ag层厚度为11 nm时, 复合结构透明导电薄膜具有最佳的品质因子为14.23×10-3 Ω-1, 此时, 其可见光区平均透过率为82%, 方块电阻为9.2 Ω/sq..
Abstract
In order to obtain high-performance flexible transparent conductive thin films, STO (30 nm)/Ag/STO (30 nm) multilayer thin films were prepared on PC substrates by magnetron sputtering. The influences of Ag mid-layer thickness on the structure, optical and electrical properties of the multilayer thin films were investigated. As the thickness of Ag mid-layer increases, the average transmittance in visible region firstly increases and then decreases, both the resistivity and sheet resistance decrease. For the multilayer thin films with 11 nm thick Ag mid-layer, it exhibits the maximum figure of merit of 14.23×10-3 Ω-1 with sheet resistance of 9.2 Ω/sq., and the average transmittance is ~82 % in the visible light region.
董清臣, 葛磊蛟, 孙永涛, 于仕辉. 柔性SrTiO3/Ag/SrTiO3复合结构透明导电薄膜的制备和性能研究[J]. 光子学报, 2018, 47(5): 0516003. DONG Qing-chen, GE Lei-jiao, SUN Yong-tao, YU Shi-hui. Preparation and Investigation of Flexible SrTiO3/Ag/SrTiO3 Multilayer Transparent Conductive Thin Films[J]. ACTA PHOTONICA SINICA, 2018, 47(5): 0516003.