中国激光, 2018, 45 (9): 0904001, 网络出版: 2018-09-08  

100 mm×100 mm镀金反射光栅的制作与测量 下载: 1076次

Fabrication and Measurement of Gold Reflective Grating with Size of 100 mm×100 mm
作者单位
1 上海大学机电工程与自动化学院, 上海 200072
2 中国科学院上海光学精密机械研究所信息光学与光电技术实验室, 上海 201800
3 中国科学院大学, 北京 100049
摘要
衍射光栅在各行各业有着广泛的应用, 这就要求光栅必须具有良好的质量。在制作大尺寸光栅的各种方法中, 激光直写技术具有明显优势, 采用并行激光直写技术制作出了尺寸为100 mm×100 mm、线数为1780 line/mm的正弦形光栅。首先对光栅进行理论分析, 找出正弦形光栅在效率最高时的槽深;然后用激光直写技术制作光栅, 最后在光栅表面镀上一层金膜。测量了光栅的衍射效率, 并预估光栅的均匀性。结果表明:光栅的衍射效率约为90%, 与理论值接近, 而且分布很均匀, 证明了并行激光直写技术制作高质量、大尺寸光栅的可行性。
Abstract
Diffraction grating is widely used in a variety of applications, which requires the grating to have good quality. Among various methods of making large-sized gratings, laser direct writing has obvious advantages. We use the parallel direct laser writing technology to produce a sinusoidal grating with size of 100 mm×100 mm and line number of 1780 line/mm. Firstly, the grating is analyzed theoretically to find a groove depth where the sinusoidal grating can reach its highest efficiency, then the grating is produced by laser direct writing and finally coated with a layer of gold. We introduce the diffraction efficiency measurement of the grating, and estimate the uniformity of the grating. The result shows that the diffraction efficiencies of the grating are around 90%, which is close to the theoretical calculation. Meanwhile, the efficiency distribution is uniform. Experimental results demonstrate that the developed parallel direct laser writing technology is feasible for producing high quality and large-sized gratings.

卜凡涛, 鲁云开, 李民康, 周常河. 100 mm×100 mm镀金反射光栅的制作与测量[J]. 中国激光, 2018, 45(9): 0904001. Bu Fantao, Lu Yunkai, Li Minkang, Zhou Changhe. Fabrication and Measurement of Gold Reflective Grating with Size of 100 mm×100 mm[J]. Chinese Journal of Lasers, 2018, 45(9): 0904001.

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