惯性约束聚变(ICF)微靶(靶丸)是惯性约束聚变物理设计思想的直接体现, 其制备过程有着非常明显的特点: 精确度要求高；工件尺度小且跨度大；面向的材料范围广；靶型多, 批量小, 且数量多；结构形状复杂且多种多样；传统方式制备工艺繁琐且制备周期长。利用先进信息技术建立完备的数字化微靶制备能力, 解决关键工艺数据流程和精确度控制技术问题, 是提高微靶质量和效率的重要手段。本文通过描述数字化靶制备系统的设计目标和思想, 重点阐述了系统的制造过程和体系结构设计、技术特点、实现方法以及实施和部署方式, 并在此基础上, 展示了系统成功实施后的部分运行效果与良好的应用前景。

Target of Inertial Confinement Fusion(ICF) is the design expression of physics of ICF, and its fabrication is characterized by high precision, small scale and large span, wide range of materials, large amount of target types, small sub-lots, complex and varied structures. The traditional fabrication method is tedious with a long period. It is an important way to improve the quality and efficiency of target by using advanced information technology to establish a complete digital target fabrication capability, and to solve the problems of key process data flow and precision control technology. Based on related digital target fabrication system design goal, the manufacturing process and implementation method of the system structural design, the technical characteristics, the way of implementation and deployment are introduced in detail. The successful operation of part of the system is demonstrated and good application prospects are expected.