红外与激光工程, 2018, 47 (5): 0506003, 网络出版: 2018-09-12   

电调谐波长移相干涉术

Wavelength phase shifting interferometry based on current modulation
作者单位
南京理工大学 电子工程与光电技术学院, 江苏 南京 210094
摘要
为了实现一体化结构干涉仪的现场数字化检测, 提出了一种电调谐波长移相干涉术, 通过控制注入电流, 调制半导体激光器(LD)的波长, 从而实现时域移相干涉。通过优化传统的随机移相干涉模型, 采用最小二乘求解线性回归模型迭代算法求解相位, 抑制了电调谐的控制精度有限、LD非线性引起的不等间隔移相, 以及环境震动引起的各采样点位相变化不同步的干扰。将该方法应用于现场检测的便携式斐索干涉仪上, 利用其与Zygo GPI XP/D型干涉仪测量同一块光学平晶, 测量结果的峰谷值偏差为9.91 nm,均方根值偏差为5.22 nm, 能满足现场定量检测的精度要求。该方法还可以应用于其他类型的激光干涉仪中。
Abstract
A tunable wavelength phase shifting interferometry based on current modulation was proposed to achieve on-site measurement of the interferometers with integrated configuration. The wavelength was modulated by changing the current injected into the laser diode (LD) to achieve temporal phase shifting interferometry. The traditional random phase shifting interference model was optimized, and phase was retrieved by iterative algorithm using least-squares techniques to solve linear regression, which suppressed the interference of unequal interval phase shifting arising from the limit of controlling precision of the current modulation and nonlinearity of LD, and synchronized phase of each sampling point caused by environmental vibration. Experimentally, the proposed method is applied to an on-site Fizeau interferometer to test an optical flat, and the measurement results are compared with Zygo GPI XP/D interferometer, where the error of their peak-to-valley value is 9.91 nm and the error of root-mean-square value is 5.22 nm, which meets the requirement of online measurement and achieves quantitative measurement. The proposed method can be applied to other laser interferometers.

丁煜, 陈磊, 王志华, 朱文华, 刘致远. 电调谐波长移相干涉术[J]. 红外与激光工程, 2018, 47(5): 0506003. Ding Yu, Chen Lei, Wang Zhihua, Zhu Wenhua, Liu Zhiyuan. Wavelength phase shifting interferometry based on current modulation[J]. Infrared and Laser Engineering, 2018, 47(5): 0506003.

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