基于狭缝波导和热光学调制的耦合特性, 提出一种尺寸为15 μm×20 μm的绝缘硅基底的超小型微环谐振器, 该器件可通过调节加热器功率调节其带宽.用时域有限差分法模拟其可调谐特性, 结果表明, 当加热器功率从0 mW增加至0.742 mW时, 1550 nm入射光的TE模式在1 900 nm波长下的带宽可调范围为2.5 nm, TM模式在1 543 nm波长处的带宽可调范围为3.1 nm.该器件尺寸小、驱动功率低、可调谐带宽范围大, 适用于动态集成光信号处理, 如重构滤波和布线等.

Based on the coupling characteristics of slot waveguides and the thermo-optical modulation, an ultra-compact microring resonator on silicon-on-insulator with the size of 15 μm×20 μm is proposed, whose bandwidth can be tuned by adjusting the heater power. The tunability characteristic is simulated through finite difference time domain method, the result demonstrates when the wavelength of incident light is 1 550 nm, its adjustable bandwidth range is 2.5 nm at 1 900 nm wavelength for TE mode and 3.1 nm at 1 543 nm wavelength for TM mode by applying the heater power from 0 mW to 0.742 mW. The proposed device with small size, low driving power and wide tunable range of bandwidth is very promising for dynamic integrated optical signal processing such as reconfigurable filtering and routing.