针对高深宽比非导电硬脆材料(如石英玻璃和陶瓷)微结构的加工需求, 对微细电解电火花切割加工方法进行了深入研究。首先, 提出了使用旋转螺旋微工具电极的电化学放电切割方法, 并对切割缝宽模型进行了讨论; 其次, 对旋转螺旋电极电解电火花切割加工工艺进行了深入的试验研究, 试验研究了加工电压、脉冲频率、占空比和主轴转速这些关键工艺参数对切割加工精度的影响。实验结果表明, 缝宽随着施加电压和占空比的增加而增加, 随着频率、主轴转速和进给速率的增加而减小。最后, 通过优化后的参数成功加工出缝宽为135 μm的微缝阵列、复杂的封闭微结构以及深宽比达6∶1的微图形结构。由此表明该方法是一种可有效加工高深宽比绝缘硬脆材料微结构的新工艺。

An in-depth study of the method of wire electrochemical discharge machining was carried out for fabricating microstructures on non-conductive brittle materials such as quartz glass and ceramics. First, the method of wire electrochemical discharge machining with a rotating spiral tool was proposed and the slit width model was established. Next, the experimental process was studied, and the influence of many key machining parameters such as the voltage, pulse frequency, duty ratio, and spindle speed on the machining accuracy was discussed in detail. The experimental results indicate that the slit width increases with an increase in the applied voltage and duty ratio and decreases with an increase in the frequency, spindle speed, and feed rate. A micro-slit array with a slit width of 135 μm and complex closed microstructures and micrographic structures with an aspect ratio of 6:1 were successfully machined by optimizing the parameters for quartz glass. Therefore, this method may prove to be an effective new technology for machining high-aspect-ratio microstructures on non-conductive, hard, and brittle materials.