采用 Petritz双层薄膜结构模型, 用化学腐蚀的方法分离 MBE外延双色 HgCdTe薄膜, 测试并验证了双层模型对中短双色 MBE外延 HgCdTe薄膜中各层的霍尔参数计算的有效性, 给出了测量不确定度评定以及相对误差。实验表明, MBE外延双层 HgCdTe薄膜中的中波薄膜层电导率及霍尔系数的扩展不确定度范围分别为 0.33～0.41 .·cm和 61～113 cm3/C, 置信概率为 95%, 与对比样品的中波膜层霍尔参数相比, 载流子浓度及霍尔迁移率的相对误差分别小于 20%和 10%。

In this paper, a model of the double layer thin film structure of Petritz is used. Validity of the model is tested by calculating Hall electrical parameters of each layer in the SW/MW dual-color HgCdTe film. The film is epitaxied by MBE and separated by chemical etching. Uncertainty and relative error of the measurements are presented. Experimental results show that the uncertainty of conductivity and Hall coefficient of the separated HgCdTe film are 0.33-0.41 .·cm and 61-113 cm3/C, respectively, with a confidence probability of 95%. Compared with Hall parameters of other MW samples, relative errors of carrier density and Hall mobility are less than 20% and 10%, respectively.