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基于时空条纹图法的光纤干涉条纹投影三维面形测量技术

Fiber-Optic Interferometer Projection Based on Spatial-Temporal Fringes for Three-Dimensional Surface Measurement Technique

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摘要

研究了传统时空条纹图法相位提取技术, 通过对移相条纹图存在线性载频时移相量的修正, 完善了该技术。将修正后的技术技术应用到光纤干涉条纹投影三维面形测量中, 并将其相位提取结果与传统的四步移相法、重叠四步平均法和改进迭代法进行对比, 结果表明:修正后的技术不仅有效抑制了光纤干涉条纹投影装置中移相器移相不准确和环境因素等引起的移相误差, 还能够消除杂散光等引起的高频噪声, 起到滤除高频噪声的作用。

Abstract

The phase extraction technique based on the traditional spatial-temporal fringe pattern method is studied, which is perfected by correcting the phase-shift of the phase-shift fringer pattern with a linear carrier frequency. This technique is also applied to the fiber-optic interferometer projection for three-dimensional surface measurements. Compared with the traditional four-step phase-shifting method, overlapping averaging four-frame algorithm, and the advanced iterative algorithm, the phase extraction technique based on the spatial-temporal fringe pattern method can effectively suppress the phase-shifting error caused by phase-shifting inaccuracy of the phase-shifter in the fiber-optic interference fringe projection device and environmental factors. Further, it can eliminate the high-frequency noise caused by factors, including stray light.

Newport宣传-MKS新实验室计划
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中图分类号:O436.1

DOI:10.3788/lop55.101203

所属栏目:仪器,测量与计量

基金项目:国家自然科学基金(11473017)

收稿日期:2018-04-17

修改稿日期:2018-05-15

网络出版日期:2018-05-20

作者单位    点击查看

李浩宇:南京理工大学电子工程与光电技术学院, 江苏 南京 210094
朱荣刚:南京理工大学电子工程与光电技术学院, 江苏 南京 210094
何勇:南京理工大学电子工程与光电技术学院, 江苏 南京 210094

联系人作者:何勇(heyong@mail.njust.edu.cn)

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引用该论文

Li Haoyu,Zhu Ronggang,He Yong. Fiber-Optic Interferometer Projection Based on Spatial-Temporal Fringes for Three-Dimensional Surface Measurement Technique[J]. Laser & Optoelectronics Progress, 2018, 55(10): 101203

李浩宇,朱荣刚,何勇. 基于时空条纹图法的光纤干涉条纹投影三维面形测量技术[J]. 激光与光电子学进展, 2018, 55(10): 101203

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