光学学报, 2018, 38 (11): 1112006, 网络出版: 2019-05-09
几何结构标定误差对偏折术的影响 下载: 835次
Effect of Geometric Calibration Errors on Deflectometry
测量 光学检测 偏折术 几何标定 误差分析 低阶面形 measurement optical testing deflectometry geometric calibration error analysis low-order surface
摘要
偏折术中的几何结构标定误差是制约低阶面形测量精度的主要因素。从数学模型、理论模拟和实验三个方面分析了几何结构标定误差与低阶面形测量误差之间的关系。给出了表示几何结构标定误差与面形测量误差之间关系的数学模型,并通过模拟和实验对其进行了验证。结果表明,几何结构标定中坐标平移误差会导致倾斜和离焦面形测量误差;被测面分别与相机和显示器之间的距离越大,几何结构标定的误差对低阶面形测量的影响越小。研究结果可以帮助设计合适的偏折术测量系统结构和提高低阶面形测量精度。
Abstract
Geometric calibration errors in deflectometry are the main factors limiting the precision of low-order surface measurement. The relationship between the geometric calibration errors and low-order surface measurement errors is analyzed with mathematic model, theory simulation and experiment. The mathematic model for the relationship between the geometric calibration errors and the surface measurement errors is introduced and verified by simulations and experiments. The results show that the coordinate translational errors in geometric calibration introduce tilt and defocus into the surface measurement results. Besides, the longer distance between the tested mirror and the camera, display, the less effect the geometric calibration errors have on the low-order surface measurement. The results can help designing the system configuration of deflectometry and improving the accuracy of low-order surface measurement.
李萌阳, 袁晓东, 曹庭分, 刘长春, 张尽力, 熊召, 陈海平, 全旭松, 易聪之. 几何结构标定误差对偏折术的影响[J]. 光学学报, 2018, 38(11): 1112006. Mengyang Li, Xiaodong Yuan, Tingfen Cao, Changchun Liu, Jinli Zhang, Zhao Xiong, Haiping Chen, Xusong Quan, Congzhi Yi. Effect of Geometric Calibration Errors on Deflectometry[J]. Acta Optica Sinica, 2018, 38(11): 1112006.