为满足海水温度高精度快速测量的需求,提出了一种基于光纤法布里-珀罗(F-P)传感器的温度传感方案。该传感器由硅片和光纤尾纤组成,硅片作为光纤F-P传感器F-P腔的腔体,利用硅的热光效应和热膨胀效应实现温度的传感。采用基于二分法的交叉相关快速解调算法对光纤F-P传感器进行高精度的快速解调。对制作的光纤F-P温度传感器进行测试,结果表明:该传感器可达到0.15 ℃的温度测量精度,可分辨0.001 ℃的温度变化,温度响应时间可达到128 ms。该传感器有望在投弃式测量领域得到应用。

In order to meet the requirements of high accuracy and rapid measurement of seawater temperature, we propose a temperature sensing scheme based on optical fiber Farby-Perot (F-P) sensor. The sensor is composed of silicon chip and fiber tail, and the silicon chip acts as the F-P cavity of the optical fiber F-P sensor. Temperature sensing is realized based on the thermal optical effect and thermal expansion effect of silicon. The demodulation algorithm of optical fiber F-P sensor is the fast cross correlation demodulation algorithm based on dichotomy, which can realize high precision and fast demodulation. The experimental results of optical fiber F-P temperature sensor show that the sensor can reach the precision of 0.15 ℃ and distinguish the temperature change at 0.001 ℃, and the temperature response time can reach 128 ms. The sensor is expected to be applied in the field of disposable measurement.