本文利用电化学沉积法在PET-ITO柔性基底上成功制备出ZnO纳米发电机。采用X射线衍射仪, 扫描电子显微镜和电化学工作站对ZnO纳米棒进行了生长观察和性能测试。 XRD图谱显示, 在不同沉积时间下ZnO纳米棒都具有(002)峰的择优取向。SEM表面形貌图显示, 电沉积时间为2 h时ZnO纳米棒呈现明显的六角纤锌矿结构。SEM断面图表明, 电化学沉积2 h的纳米棒最长为1.1 μm。为了更好地观察不同沉积时间对纳米发电机的性能影响, 在沉积时间为1, 1.5, 2 h的条件下制备了3种纳米发电机。最终结果显示, 电沉积时间2 h制备的纳米发电机的电压输出性能最好, 输出电压为960 mV。最后, 研究了电沉积法制作纳米发电机的工作机制。

In the present study, ZnO nanogenerators were fabricated on PET-ITO flexible substrates by electrochemical deposition. The ZnO nanorods were examined using an X-ray diffractometer, a scanning electron microscope, and an electrochemical workstation. The results show that the ZnO nanorods exhibit a preferred orientation of the (002) peak that varies with the deposition time. SEM images show that the ZnO nanorods that were electrodeposited in under 2 h exhibit a significant hexagonal wurtzite structure. SEM cross-sectional images of these ZnO nanorods show that they have a length of up to 1.1 μm. To better observe the piezoelectric properties of nano-generators for which the ZnO nanorods were deposited over different durations, three different types of nano-generator were prepared. The results show that the nanogenerator with the ZnO nanorods that were deposited in under 2 h has an output voltage of 960 mV. In addition, this paper explains the working mechanism of a nano-generator prepared using the electrodeposition method.