利用新型准直远场探测包光栅元件的双向衍射, 实现了空间滤波器的小孔准直, 特别是对同一段光路中两个空间滤波器的小孔对准.该方案克服了传统滤波器对小孔尺寸的限制并满足远场准直包高稳定性的要求, 在光路远场准直的同时实现了小孔中心位置的监测与准直调整, 并在以色列项目中得以成功应用, 装置实验结果表明: 针对装置15倍衍射极限大小的小孔, 对准精度小于小孔直径3%, 满足装置器件小孔对准调试小于小孔直径4%的要求.

Using grating diffraction of a new far field alignment package, the spatial filtering pinholes alignment in two spatial filters especially on the same optical path is achieved. This scheme overcomes the shortcomings of pinholes size requirement of traditional method, realizes two pinholes center aligned while maintaining beams far|field alignment function. The new method has been successfully applied to the Israel project. The facility experiment results show that the alignment accuracy is less than 3% of the pinhole diameter which is 15 times of the beams diffraction limit, which meets the requirements of facility debugging (<4% of the pinhole diameter).