为提高光谱探测器响应灵敏度, 减少宽光谱光束入射时产生的光能损失, 研制了超短紫外到近红外宽波段增透膜.依据增透膜设计理论, 采用隧道方法与自动优化相结合的膜系设计方法, 综合考虑膜厚影响因素, 建立了评价函数.通过优化沉积工艺, 提高了增透膜透射率.光谱测试结果表明, 200~900 nm宽波段范围的增透膜的平均透射率为95.7%, 满足光谱探测的要求.

In order to increase the response sensitivity of detector and reduce the loss of light energy when a broad spectrum beam is incident, a kind of optical film is developed, which can realize anti-reflective at a broadband between ultraviolet-c and near infrared. Based on the anti-reflective thin film theory, combined with tunneling and automatic optimization, an evaluation function is established by comprehensively considering the factor effect of film thickness. By optimizing the deposition process, the transmittance of the anti-reflective coating is improved. The results of spectral tests show that the average transmittance in the bands of 200 nm to 900 nm is 95.7%, which satisfies the requirement of spectroscopy detection.