为适应微电子制造装备中精密位移反馈装置的要求, 提出并设计了一种新型宏微复合光栅尺测量系统.测量系统采用LabVIEW虚拟仪器系统高速采集图像数据, 通过图像处理算法对放大后的光栅栅纹进行边界处理, 将其细化为线再转化为像素点, 并补偿运动过程中的微量位移来提高精度.实验结果表明：电机速度为1 mm/s, 行程为100 mm内时, 该系统产生的位移误差可控制在1.5 μm内, 分辨率可达0.275 μm.与传统光栅尺测量中需对莫尔条纹进行电子细分相比, 本测量系统可以有效消除光栅尺破损、污染、倾斜、光源不稳定等干扰给测量带来的影响, 同时保持微米级别的测量精度, 特别适用于敞开式光栅尺长行程的测量领域.

In order to meet the requirements of precision displacement feedback devices in microelectronics manufacturing equipment, a macro-micro composite grating ruler measurement system is proposed. First, the LabVIEW virtual instrument system is used for image data acquisition with high-speed. Then, the boundary of the amplified raster grating pattern is turned into lines with image processing method, which are later converted into pixel points, and the micro displacement in the motion process is compensated to improve the accuracy. The experiment results show that the proposed system can be used to keep the displacement error to 1.5 μm and the resolution to 0.275 μm with the motor speed of 1 mm/s and the distance of 100 mm. Compared with the traditional grating ruler measurement with moiré fringe electronically subdivided, the proposed measurement system can effectively eliminate the interference, such as grating scale damage, pollution, tilt and light source instability, on the measurement while maintaining the micron-level measurement accuracy, which is especially suitable for the long-distance measurement of open-scale grating ruler.