光电工程, 2018, 45 (10): 180195, 网络出版: 2018-12-18
便携式紫外-可见光谱仪设计及关键技术研究
Design and key technology research of portable UV-VIS spectrometer
紫外-可见光谱仪 Lumogen 薄膜 紫外增强 闪耀光栅 光栅效率 UV-VIS spectrometer Lumogen film UV-enhanced CCD CCD blazed grating grating efficiency
摘要
随着紫外光谱探测技术的广泛应用,低成本便携式紫外-可见光谱仪成为该领域的研究热点。本文首先依据交叉型Czerny-Turner 结构设计了便携式紫外光谱仪光路结构。其次,针对性研究了紫外光谱仪的关键器件:紫外探测器和闪耀光栅。利用Lumogen 荧光材料和蒸镀成膜法制作镀膜紫外增强CCD,并分析了荧光薄膜在CCD 表面的位置对分辨率的影响;从理论上分析了闪耀光栅对于紫外波段的多级衍射效率的影响,确定了紫外光谱仪对于闪耀光栅的选择。最后,研制的便携式紫外-可见光谱仪样机的性能测试结果表明,200 nm~900 nm 波段、25 μm 狭缝宽度、600lp/mm、300 nm 闪耀光栅配置下分辨率整体小于1.5 nm,200 nm~300 nm 紫外波段的光谱响应度提高到20%,实现了便携式紫外-可见光谱仪的设计要求。
Abstract
With the widespread application of ultraviolet spectroscopy, low-cost portable ultraviolet spectrometer has become a research focus in this field. Firstly, the optical structure of the portable UV-VIS spectrometer was designed based on the crossed-asymmetric Czerny-Turner structure in the paper. Secondly, the key devices of ultraviolet spectrometer, namely ultraviolet detectors and blazed gratings, were studied. The coated UV-enhanced CCDs were fabricated using Lumogen fluorescent materials and vacuum coating methods. The influence of the position on the CCD surface of the fluorescent film on the resolution was analyzed. The effect of blazed gratings on the multi-order diffraction efficiency in the ultraviolet region was theoretically studied. Finally, the test results of performance of a portable UV-VIS spectrometer prototype show that the resolution of the 200 nm~900 nm band, 25 μm slit width, 600 lp/mm, 300 nm blazed grating configuration is less than 1.5 nm and the spectral responsivity increases to 20% in the spectral range varying from 200 nm to 300 nm, which meets the design requirements of the portable UV-VIS spectrometer.
王国栋, 夏果, 李志远, 胡明勇, 陆红波. 便携式紫外-可见光谱仪设计及关键技术研究[J]. 光电工程, 2018, 45(10): 180195. Wang Guodong, Xia Guo, Li Zhiyuan, Hu Mingyong, Lu Hongbo. Design and key technology research of portable UV-VIS spectrometer[J]. Opto-Electronic Engineering, 2018, 45(10): 180195.