根据等效介质理论和严格耦合波理论，提出了可见光波段下基于氧化铝材料的亚波长导模共振光栅滤波器的理论设计与仿真方法。利用Rsoft软件分别仿真分析强调制和弱调制下的氧化铝光栅反射光谱，并探讨了光栅周期(400～420 nm)、占空比(0.2～0.8)和光栅厚度(117～367 nm)等结构参数的改变对光栅光谱特性的影响。仿真结果表明，氧化铝光栅在610 nm波长处具有优秀的滤波效果:旁带＜3%，半高宽(FWHM)＜0.3 nm，高反射率(接近100%)。最后采用快速原子束刻蚀技术制备出了可见光波段下的氧化铝材料导模共振滤波器。

According to the rigorous coupled wave theory and the equivalent medium theory, we propose a design and simulation methods for a sub-wavelength guided mode resonant grating filter based on the alumina material. The reflection spectrums of alumina grating in strong and weak modulation system are simulated and analyzed by Rsoft. Also, the influence of structural parameters such as grating period (400~420 nm), duty ratio (0.2 ~ 0.8) and grating thickness (117~367 nm) on the spectral characteristics of grating are investigated. The simulation results indicate that the alumina grating has excellent filtering effect at 610 nm wavelength with the side band less than 3%, FWHM < 0.3 nm and high reflectivity (close to 100%). Finally, we fabricated a alumina resonance filter in the spectral region by fast atom beam etching technology.