激光诱导损伤阈值是大功率光学系统中重要参数, 其数值大小对激光系统的输出功率与稳定性具有重要影响。为了突破损伤阈值对激光光学系统输出功率的限制, 科研人员主要从制备薄膜工艺、激光特性、薄膜特性以及薄膜后工艺等方面开展研究。本文介绍了高反膜理论、制备工艺; 综述了近十年来国内外对高反膜损伤研究的成果; 阐述了激光特性、薄膜特性以及薄膜后工艺对薄膜损伤阈值的影响。在此基础上, 对提高高反膜损伤阈值的研究和发展趋势进行了分析与展望。

The laser-induced damage threshold is an important parameter in high-power optical systems, and it has an important influence on the output power and stability of laser system. In order to break through the limitation of the damage threshold on the output power of the laser optical system, researchers have carried out research mainly on film preparation, laser characteristics, film properties and thin film post-treatment. In this paper, the theory and preparation of high reflective film are introduced; the research results of high anti-membrane damage at home and abroad in the past decade are reviewed; the effects of laser characteristics, thin film properties and thin film post-treatment on the film damage threshold are also discussed. On this basis, the research and development trend of improving high reflective film damage threshold are analyzed and prospected.