光斑质量直接影响激光位移传感器测量的精度。为了提高激光位移传感器传感探头光学系统的成像质量, 设计了传感探头四片式微小型光学系统。本文在理想成像基础上, 分析光束在光学系统中能量传递的变化规律, 对比光电探测器的感光能力, 利用光学设计软件(ZEMAX)实现了激光位移传感器传感探头微小型光学系统的设计。通过理论计算分析, 严格控制传感探头孔径光阑的大小, 对光学系统进行优化处理, 成像最大弥散斑半径低于33 μm, 空间分辨率120 lp/mm以下的传递函数MTF(Modulation Transfer Function)值大于05, 光线扇形图的最大像差小于5 μm, 畸变量低于01859%。该光学系统具有良好的成像效果, 可以满足激光位移传感器探测系统对成像系统成像光斑质量的要求, 以保证传感器的测量精确度优于5 μm。

Spot quality can directly affect the measuring accuracy of laser displacement sensor. In order to improve the imaging quality of sensing probe optical system for the laser displacement sensor, a four-piece micro-optical system for sensing probes is designed. Based on the ideal imaging, we analyze the law of energy transfer in the optical system, compare the sensitivity of the photoelectric detector, and use the optical design software ZEMAX to realize the design of the micro-optical system of the laser displacement sensor. Through theoretical calculation and analysis, the size of the aperture of the sensing probe is strictly controlled, and the optical system is optimized. As a result, the maximum radius of spot is 3226 μm, the value of Modulation Transfer Function(MTF) is over 05 when the spatial resolution is confined within the boundary of 120 lp/mm, the error of Ray Fan is 5 μm or less and the maximum distortion is less than 0185 9%. The optical system has a good imaging effect, so that the laser displacement sensor detection system can meet the imaging spot quality requirements of the imaging system to ensure that the measurement accuracy of the sensor is better than 5 μm.