制备了一种中心波长为852 nm的内腔液晶可调谐垂直腔面发射激光器结构。研究了不加调谐电压时可调谐VCSEL的电流-电压-光功率关系, 注入电流为10 mA时, 得到了器件的最大输出功率为2.3 mW。结果表明, 内腔液晶可调谐垂直腔面发射激光器的波长调谐范围达到27 nm, 调谐效率为9 nm/V。

wavelength tunable vertical cavity surface emitting laser with central wavelength of 852 nm was designed based on the characteristics of electrically controlled birefringence of liquid crystal. The current-voltage-optical power curve of the tunable VCSEL was tested when the tuning voltage was not applied and the injection current at the spectral curve was 10 mA, and the maximum output power of the device was 2.3 mW. The results show that the wavelength tuning range of the intracavity liquid crystal tunable vertical cavity surface emitting laser is 27 nm and the tuning efficiency is 9 nm/V.