激光技术, 2019, 43 (1): 43, 网络出版: 2019-01-22
基于共振光隧穿效应的加速度传感器
Acceleration sensors based on resonant optical tunneling effect
传感器技术 共振光隧穿效应 加速度传感器 灵敏度 谐响应 sensor technique resonant optical tunneling effect acceleration sensor sensitivity harmonic response
摘要
为了设计新型的加速度传感器, 将共振光隧穿结构应用于传感元件, 利用COMSOL软件对传感器的频率响应、灵敏度性能等关键要素进行了模拟仿真分析, 搭建了实验平台, 验证了共振光隧穿原理。结果表明, 基于共振光隧穿效应结构的加速传感器在100Hz~3000Hz范围内、加速度为500m/s2的情况下, 灵敏度可达到6.7dB/g。该传感器小巧轻便、结构简单, 且具有较高的灵敏度, 这为光学传感器的研究提供了新的方法和思路, 具有广阔的应用前景。
Abstract
In order to design a new acceleration sensor, resonant optical tunneling effect(ROTE) structure was applied to design the optical sensor. The key factors, such as frequency response and sensitivity performance of the sensor, were simulated and analyzed by using COMSOL software. The experimental platform was built to verify the principle of resonant optical tunneling effect. The results show that the sensitivity of ROTE acceleration sensor is 6.7dB/g when acceleration is 500m/s2 in the range of 100 Hz to 3000Hz. The sensor is deft, simple and has high sensitivity. The study provides a new idea and method for optical sensor and has broad application prospects.
白刚, 菅傲群, 邹璐. 基于共振光隧穿效应的加速度传感器[J]. 激光技术, 2019, 43(1): 43. BAI Gang, JIAN Aoqun, ZOU Lu. Acceleration sensors based on resonant optical tunneling effect[J]. Laser Technology, 2019, 43(1): 43.