光子学报, 2019, 48 (1): 0114004, 网络出版: 2019-01-27
垂直腔面发射激光器相干耦合阵列二维光束偏转
Two-dimensional Beam Steering in Coherently Coupled Vertical Cavity Surface Emitting Laser Arrays
半导体光电器件 垂直腔面发射激光器 相干耦合阵列 光束偏转 质子注入 Semiconductor optoelectronic devices Vertical cavity surface emitting laser Coherently coupled array Beam steering Proton implantation
摘要
通过建立数值模型, 分析了垂直腔面发射激光器相干耦合阵列单元数量、单元间距、单元间相位差对光束质量及偏转角度的影响.仿真结果表明, 单元数量越多, 发散角越小; 单元间距越小, 旁瓣强度越小; 单元间相位差越大, 偏转角度越大.因此, 设计相干阵列时, 需要尽量减小单元间距, 增大阵列规模, 实现单元间大相位差的控制.实验制备了3单元相干耦合阵列, 通过分离电极实现了单元注入电流的独立控制以及单元间相位差的控制, 最终实现二维方向上的光束操控.
Abstract
The beam quality and deflection angle of vertical cavity surface emitting laser arrays dependent on element number, separation and relative phase difference were analyzed via numerical modeling analysis. According to simulated results, the divergence angle of the array varies inversely with the number of array elements. The smaller the element separation, the smaller the intensity of side lobes. The larger the phase difference between the elements, the larger the deflection angle. Therefore, it is necessary to decrease element separation, increase array scale and increase phase difference between elements for designing the coherent vertical cavity surface emitting laser arrays. In addition, 3-element vertical cavity surface emitting laser arrays were designed and fabricated. Two-dimensional beam steering was achieved successfully via separate contacts which can control current injection into each element to control phase difference between elements.
许坤, 王海丽, 王献立, 杜银霄, 荀孟. 垂直腔面发射激光器相干耦合阵列二维光束偏转[J]. 光子学报, 2019, 48(1): 0114004. XU Kun, WANG Hai-li, WANG Xian-li, DU Yin-xiao, XUN Meng. Two-dimensional Beam Steering in Coherently Coupled Vertical Cavity Surface Emitting Laser Arrays[J]. ACTA PHOTONICA SINICA, 2019, 48(1): 0114004.