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集成光波导干涉芯片的设计及特性研究

Design and Properties Approach of an Integrated Interference Chip Made by Optical Waveguides

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摘要

运用光波导的模式理论设计了多层集成光波导干涉芯片, 对芯片的光波导结构和材料参数进行优化, 并制作了集成干涉芯片.借助集成芯片的波导双通道, 通过干涉获得了高对比度的远场干涉条纹.在实验误差范围内, 当外界环境条件发生微小变化时, 干涉条纹发生移动, 符合杨氏双缝干涉理论的预期.芯片对水汽、酒精的探测灵敏度约为100 ppm, 并具有足够的温度稳定性.该集成干涉芯片具有低浓度环境气体检测的应用前景, 可为集成高灵敏气体传感器的开发提供发展平台.

Abstract

An optical waveguide interference chip with a multi-layer planar structure was designed, and the integrated chip was fabricated successfully after its structure and the material parameters were optimized using the mode theory of optical waveguide. Far-field interference fringes with a high contrast are achieved by the dual-guide waveguide structure inside the chip. Within an experimental error, experiments demonstrate that the interference fringe pattern generated from the integrated chip can be explained and predicted by Young′s double-slit theory, and the fringe moves under a minor environment change. For humidity and alcohol gas, the detection sensitivity of the chip can reach about 100 ppm level with enough temperature stability during estimate test, which demonstrates its potential applications in sensing environment gas with low concentration and provides a new platform to develop an integrated gas sensor with high sensitivity.

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中图分类号:O436

DOI:10.3788/gzxb20194801.0123002

基金项目:国家自然科学基金(No.61465015)

收稿日期:2018-07-09

修改稿日期:2018-09-27

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作者单位    点击查看

张何丽:云南大学 物理与天文学院 物理系, 昆明 650091
姜欢:云南大学 物理与天文学院 物理系, 昆明 650091
张冰:云南大学 物理与天文学院 物理系, 昆明 650091
任一涛:云南大学 物理与天文学院 物理系, 昆明 650091

联系人作者:张何丽(zhanghelisdy@126.com)

备注:张何丽(1995-), 女, 硕士研究生, 主要研究方向为光电子与光通信器件.

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引用该论文

ZHANG He-li,JIANG Huan,ZHANG Bing,REN Yi-tao. Design and Properties Approach of an Integrated Interference Chip Made by Optical Waveguides[J]. ACTA PHOTONICA SINICA, 2019, 48(1): 0123002

张何丽,姜欢,张冰,任一涛. 集成光波导干涉芯片的设计及特性研究[J]. 光子学报, 2019, 48(1): 0123002

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