光学学报, 2019, 39 (2): 0212006, 网络出版: 2019-05-10
基于数字图像相关的平面物体面形散斑图形偏折术
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Planar Object Surface Shape Speckle Pattern Deflectometry Based on Digital Image Correlation
测量 光学测试 面形 数字图像相关 偏折术 散斑图形 measurement optical testing surface shape digital image correlation deflectometry speckle pattern
摘要
提出了一种基于数字图像相关(DIC)的散斑图形偏折术(SPD),将二维DIC用于测量镜面的三维面形。用散斑位移代替条纹形变,使偏折术的测量过程更简单高效,只需拍摄两幅散斑图,面形检测精度可以达到微米量级。介绍了SPD的原理与方法,推导了相关公式,对散斑图进行了设计制作。实验测量了一块有机玻璃板的面形,与相位测量偏折术的结果对比,其测量精度接近1 μm。
Abstract
A speckle pattern defletometry (SPD) based on digital image correlation (DIC) is proposed. The two-dimensional DIC is used to measure the three-dimensional shape of a specular surface. The displacements of speckle patterns instead of the deformations of fringes are used to make the deflectometry measurement process simpler and more efficient. Only two speckle patterns need to be taken and the measurement accuracy of surface can reach micrometer level. The principle and method of SPD are described. The relevant formulas are derived, and the design and production of a speckle pattern are involved. An acrylic plastic plate is measured in the experiment. Compared with the experimental results of the phase measuring deflectometry, the measurement accuracy of nearly 1 μm is achieved.
汤海潮, 李大海, 李磊, 陈鹏宇, 王瑞阳, 王琼华. 基于数字图像相关的平面物体面形散斑图形偏折术[J]. 光学学报, 2019, 39(2): 0212006. Haichao Tang, Dahai Li, Lei Li, Pengyu Chen, Ruiyang Wang, Qionghua Wang. Planar Object Surface Shape Speckle Pattern Deflectometry Based on Digital Image Correlation[J]. Acta Optica Sinica, 2019, 39(2): 0212006.