光学学报, 2019, 39 (3): 0312001, 网络出版: 2019-05-10
一种非线性相位误差的全场补偿方法 下载: 1115次
A Full-Field Compensation Method for Nonlinear Phase Error
测量 三维测量 相位补偿 非线性相位误差查找表 相位测量轮廓术 Gamma非线性效应 measurement three-dimensional measurement phase compensation nonlinear phase error look-up table phase measuring profilometry Gamma nonlinear effect
摘要
提出了一种非线性相位误差的全场补偿方法,通过对参考面相位的多次测量,提高了参考面的解相精度,提取出一个逼近理想值的期望相位面,并用该期望相位面检测非线性相位误差。重构待测物体时,可直接用物体展开相位值在查找表中查找对应的非线性相位误差,并以此对物体的展开相位进行全场补偿。采用所提方法重构已知具体高度的平面,平均绝对误差的最大值从0.48 mm减小到0.06 mm,方均根误差的最大值从0.55 mm减小到0.07 mm。
Abstract
A full-field compensation method for nonlinear phase error is proposed. By measuring the reference plane for multiple times, the accuracy of phase unwrapping on the reference plane can be efficiently improved. An expected phase plane approaching to the ideal values can be extracted from these multiple measured phases on the reference plane. This expected phase plane can be used to detect the nonlinear phase error. When reconstructing the measured object, the nonlinear phase error can be directly searched in the look-up table with the unwrapped phase of the object, then the full-field unwrapping phase of the object be compensated. By using the proposed method to reconstruct several height-known flat planes, the maximum mean absolute error (MAE) is decreased from 0.48 mm to 0.06 mm and the maximum root-mean-square error (RMSE) is decreased from 0.55 mm to 0.07 mm.
蔡文娟, 曹益平, 付光凯, 王亚品, 万莹莹, 李城梦, 王璐. 一种非线性相位误差的全场补偿方法[J]. 光学学报, 2019, 39(3): 0312001. Wenjuan Cai, Yiping Cao, Guangkai Fu, Yapin Wang, Yingying Wan, Chengmeng Li, Lu Wang. A Full-Field Compensation Method for Nonlinear Phase Error[J]. Acta Optica Sinica, 2019, 39(3): 0312001.