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软X射线荧光吸收谱测试方法的建立与应用

Establishment and Application of Testing Method for Fluorescence Based Soft X-Ray Absorption Spectrum

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摘要

提出一种基于主成分分析法的装调方案;对理想的离轴三反系统的灵敏度矩阵进行处理,以获得系统失调量对残余像差敏感度的权重值,通过去除敏感度低的调整量来制定合理的装调方案;基于逆向优化法的计算机辅助装调技术原理,进行模拟装调及装调方案的验证.结果表明:采用所制定的装调方案可使装调精度达到10-7量级,调整量从11个减少到6个,装调难度降低,光机结构的稳定性得到提高.

Abstract

A testing method of fluorescence based soft X-ray absorption spectroscopy is proposed. The method overcomes the problem of low fluorescence yield in soft X-ray region and eliminates self-absorption effect of fluorescence, and the soft X-ray absorption near edge structures (S-XANES) of materials are obtained by partially fluorescence yield (PFY) mode. Through the PFY mode, the soft X-ray absorption near edge structures of the buried element in perovskite solar cells, the trace element of catalyst, and the wide bandgap semiconductor are investigated. Compared with the total electron yield mode (TEY), the developed PFY mode of S-XANES has the advantages in characterization of materials bulk property, insulating materials and samples with low concentration.

Newport宣传-MKS新实验室计划
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中图分类号:O433.1

DOI:10.3788/aos201939.0330002

所属栏目:光谱学

基金项目:国家自然科学基金(11505280,11475251)

收稿日期:2018-09-21

修改稿日期:2018-10-22

网络出版日期:2018-11-08

作者单位    点击查看

陈振华:中国科学院上海应用物理研究所上海同步辐射光源, 上海 201204
李俊琴:中国科学院上海应用物理研究所上海同步辐射光源, 上海 201204
赵子龙:中国科学院上海应用物理研究所上海同步辐射光源, 上海 201204
桑卓成:东华大学理学院, 上海 201620
邹鹰:中国科学院上海应用物理研究所上海同步辐射光源, 上海 201204
王勇:中国科学院上海应用物理研究所上海同步辐射光源, 上海 201204
邰仁忠:中国科学院上海应用物理研究所上海同步辐射光源, 上海 201204

联系人作者:邹鹰(zouying@sinap.ac.cn)

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引用该论文

Chen Zhenhua,Li Junqin,Zhao Zilong,Sang Zhuocheng,Zou Ying1,Wang Yong,Tai Renzhong. Establishment and Application of Testing Method for Fluorescence Based Soft X-Ray Absorption Spectrum[J]. Acta Optica Sinica, 2019, 39(3): 0330002

陈振华,李俊琴,赵子龙,桑卓成,邹鹰,王勇,邰仁忠. 软X射线荧光吸收谱测试方法的建立与应用[J]. 光学学报, 2019, 39(3): 0330002

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