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镀有增透膜的多层衍射光学元件的优化设计方法

Optimal Design for Multi-Layer Diffractive Optical Elements with Antireflection Films

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摘要

基于等效介质理论和多层衍射元件的本体相位延迟,考虑增透膜相位调制的影响,对多层衍射光学元件的表面微结构参数进行优化;采用优化设计方法分析应用于可见光波段镀有增透膜的多层衍射光学元件。结果表明:优化设计方法在保证增透膜物理作用的前提下,实现了在设计波长处的衍射效率为100%以及在宽波段内具有高多色光积分衍射效率;该方法弥补了传统多层衍射光学元件的设计缺陷,完善了多层衍射光学元件的设计理论,为混合成像系统的设计提供了参考。

Abstract

On the basis of the equivalent-medium theory and the body phase delay of multi-layer diffractive optical elements, considering the influences of phase modulation caused by antireflection films, the surface microstructural parameters of multi-layer diffractive optical elements are optimized to realize the diffraction efficiency of 100% at the design wavelengths and the high polychromatic integral diffraction efficiency within a broad waveband. With this optimal design method, the diffraction efficiency and polychromatic integral diffraction efficiency of multi-layer diffractive optical elements with antireflection films working in visible wavebands are analyzed. The results show that with this optimal design method, the diffraction efficiency of 100% at the designed wavelengths and the high polychromatic integral diffraction efficiency within a broad waveband can be achieved under the premise of ensuring the physical effects of antireflection films. This method makes up for the traditional design defects of multi-layer diffractive optical elements and improves the design theory of multi-layer diffractive optical elements, which provides a reference for the design of hybrid imaging systems.

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中图分类号:O436

DOI:10.3788/aos201939.0305001

所属栏目:衍射与光栅

基金项目:国家自然科学基金(11634010)、中国博士后科学基金(2018M643728)

收稿日期:2018-10-08

修改稿日期:2018-10-24

网络出版日期:2018-10-30

作者单位    点击查看

毛珊:西北工业大学理学院陕西省光信息技术重点实验室, 陕西 西安 710072西北工业大学理学院超常条件材料物理与化学教育部重点实验室, 陕西 西安 710072
赵建林:西北工业大学理学院陕西省光信息技术重点实验室, 陕西 西安 710072西北工业大学理学院超常条件材料物理与化学教育部重点实验室, 陕西 西安 710072

联系人作者:赵建林(jlzhao@nwpu.edu.cn)

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引用该论文

Mao Shan,Zhao Jianlin. Optimal Design for Multi-Layer Diffractive Optical Elements with Antireflection Films[J]. Acta Optica Sinica, 2019, 39(3): 0305001

毛珊,赵建林. 镀有增透膜的多层衍射光学元件的优化设计方法[J]. 光学学报, 2019, 39(3): 0305001

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