摘要

以二维位移测量为应用实例，在对光漂的产生机制及特性进行分析的基础上，提出了一种差分补偿和共路补偿相结合的光漂补偿方案，并对所采用的两种补偿方法进行了详细分析及实验验证。实验结果表明，对于光线角度漂移和总漂移，差分补偿法分别可以实现35.2%和54.4%的补偿效果，共路补偿法对光线总漂移可以实现42.2%的补偿效果。研究结果可为解决激光准直测量中光漂补偿这一共性问题提供技术支持。

Abstract

With the two-dimensional displacement measurement as an application example and based on the analysis of the generation mechanism and characteristics of laser beam drifts, a method for laser beam drift compensation is proposed by the combination of differential compensation with the common path compensation. In addition, these two compensation methods are analyzed in detail and verified by experiments. The experimental results show that, the compensation effects of the angular drift and total drift of the beam for the differential compensation method are 35.2% and 54.4%, respectively. In contrast, the compensation effect of the total drift of the beam for the common path compensation method is 42.2%. The research results can providea technical support for solving the common problem of beam drift compensation in laser alignment measurement.

补充资料

中图分类号：TN247

DOI：10.3788/lop56.071203

所属栏目：仪器，测量与计量

基金项目：国家自然科学基金河南省联合项目（U1304507）、河南省自然科学基金（182300410189）、河南省科技发展计划（172102210552，182102310732）

收稿日期：2018-09-29

修改稿日期：2018-10-16

网络出版日期：2018-10-24

作者单位    点击查看

联系人作者：翟玉生(hf_sy@sohu.com)

【1】Rao R Z, Wang S P, Liu X C, et al. Experimental study of spot dancing of laser beam in a turbulent atmosphere［J］. Chinese Journal of Lasers, 2000, 27(11): 1011-1015.
饶瑞中, 王世鹏, 刘晓春, 等. 湍流大气中激光束漂移的实验研究［J］. 中国激光, 2000, 27(11): 1011-1015.

【2】Zhao Q, Zhong M, Lü B D. Experimental study about laser beam wander in atmosphere［J］. Laser Technology, 2010, 34(4): 532-534.
赵琦, 钟鸣, 吕百达. 大气激光束漂移的实验研究［J］. 激光技术, 2010, 34(4): 532-534.

【3】Yang Y, Wu R, Sun M Y, et al. Collimation optical system with light filed coupling of high-power lasers［J］. Chinese Journal of Lasers, 2018, 45(8): 0805001.
杨野, 邬融, 孙明营, 等. 高功率激光光场耦合的准直光学系统［J］. 中国激光, 2018, 45(8): 0805001.

【4】Ye C L, Shang J H, He Y. Study of laser beam autocollimation system［J］. Laser & Optoelectronics Progress, 2017, 54(5): 051201.
叶成樑, 尚建华, 贺岩. 光路自动准直系统研究［J］. 激光与光电子学进展, 2017, 54(5): 051201.

【5】Zhai Y S, Geng L J, Li Y, et al. Survey of laser beam drift compensation methods［J］. Laser Journal, 2015, 36(9): 1-4.
翟玉生, 耿利杰, 李阳, 等. 激光光线漂移补偿方法综述［J］. 激光杂志, 2015, 36(9): 1-4.

【6】Feng Q B, Liu Y Z, Zhang B, et al. A simple laser collimator based on single-mode fiber-coupled laser module［J］. Chinese Journal of Scientific Instrument, 2005, 26(1): 28-31.
冯其波, 刘依真, 张斌, 等. 基于半导体激光光纤组件的激光准直仪［J］. 仪器仪表学报, 2005, 26(1): 28-31.

【7】Zhang X B, Zhao B, Li Z. A collimating tracking and positioning laser system with non-diffracting beams and Moire fringe technology［J］. Laser Technology, 2001, 25(2): 118-121.
张新宝, 赵斌, 李柱. 无衍射光莫尔条纹准直、跟踪和定位系统的研制［J］. 激光技术, 2001, 25(2): 118-121.

【8】Hao Q, Li D C, Wang Y T. High-accuracy long distance alignment using single-mode optical fiber and phase plate［J］. Optics & Laser Technology, 2002, 34(4): 287-292.

【9】Hu X H, Yang B X. Research on semiconductor laser collimator and its laser beam drift compensation［J］. Optics & Optoelectronic Technology, 2007, 5(3): 25-27.
胡新和, 杨博雄. 半导体激光准直仪及其激光束漂移补偿研究［J］. 光学与光电技术, 2007, 5(3): 25-27.

【10】Huang X D, Yu W B, Tan J B. Study on real-time compensation method for laser drift in 2D displacement measurement［J］. Journal of Optoelectronics·Laser, 2014, 25(2): 299-304.
黄向东, 于文波, 谭久彬. 二维位移测量中激光漂移实时补偿方法研究［J］. 光电子·激光, 2014, 25(2): 299-304.

【11】Zhai Y S, Feng Q B, Zhang B. A simple roll measurement method based on a rectangular-prism［J］. Optics & Laser Technology, 2012, 44(4): 839-843.

【12】Yang S L, Su Y B, He J T, et al. Study of measurement accuracy of position sensitive detectors［J］. Laser Technology, 2014, 38(6): 830-834.
杨淑连, 宿元斌, 何建廷, 等. 位置敏感探测器测量准确度的研究［J］. 激光技术, 2014, 38(6): 830-834.

【13】Cheng Z, Dong D F, Zhou W H, et al. High precision laser position detecting system based on position sensitive device［J］. Laser & Optoelectronics Progress, 2016, 53(8): 081202.
程智, 董登峰, 周维虎, 等. 基于位置敏感器件的高精度激光位置检测系统［J］. 激光与光电子学进展, 2016, 53(8): 081202.

【14】Chen H F, Sun Y Q, Wang Y W, et al. High-precision laser tracking measurement method and experimental study［J］. Chinese Journal of Lasers, 2018, 45(1): 0104003.
陈洪芳, 孙衍强, 王亚韦, 等. 高精度激光追踪测量方法及实验研究［J］. 中国激光, 2018, 45(1): 0104003.

【15】Li J A, Tan J B, Cui J W. Study on method of feedback compensation drift of collimation beam based on filter［J］. Journal of Optoelectronics·Laser, 2013, 24(2): 336-342.
李结安, 谭久彬, 崔继文. 基于滤波的准直光束漂移反馈补偿方法研究［J］. 光电子·激光, 2013, 24(2): 336-342.

【16】Zhai Y S, Jiang L J, Wang X J, et al. High-precision displacement measurement method based on laser modulation［J］. Journal of Applied Optics, 2018, 39(2): 230-234.
翟玉生, 蒋留杰, 王新杰, 等. 一种基于激光调制的高精度位移测量方法［J］. 应用光学, 2018, 39(2): 230-234.

【17】You F L, Feng Q B, Zhang B, et al. A new method for measuring laser beam straightness error based on common-path compensation［J］. Optoelectronics Letters, 2009, 5(5): 383-386.

【18】Feng Q B, Zhang B, Cui C X, et al. Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide［J］. Optics Express, 2013, 21(22): 25805-25819.

引用该论文

Zhai Yusheng,Liu Wenlong,Wang Xinjie,Xie Zehua,Yan Saisai,Guo Yihang. Methods for Laser Beam Drift Compensation in Laser Alignment Measurement[J]. Laser & Optoelectronics Progress, 2019, 56(7): 071203

翟玉生,柳文龙,王新杰,谢泽铧,闫赛赛,郭逸航. 激光准直测量中的光漂补偿方法[J]. 激光与光电子学进展, 2019, 56(7): 071203