自20世纪60年代激光器被发明以来, 其脉冲宽度被不断压缩至亚皮秒及飞秒量级, 使得激光加工技术进入到了超短脉冲阶段。为了进一步优化超短脉冲激光的微加工, 理论研究必不可少。主要论述了超短脉冲激光与不同类型材料之间的相互作用机制。简述了超短脉冲激光微孔加工中的典型物理特性, 如等离子体效应、自聚焦和光丝效应及锥形辐射等。分析了超短脉冲激光微孔加工的理论研究现状, 并得出了目前理论研究中存在的问题。

Since the invention of lasers in the 1960s, the pulse duration has being continuously shorten down to the sub-picosecond and even femtosecond regime. It makes the laser processing technology to the ultrashort pulse laser era. In order to further optimize the ultrashort pulse laser micro-machining, theoretical study is indispensable. The interaction mechanism between ultrashort pulse laser and different types of materials were presented. The typical physical properties, such as plasma effect, self-focusing and filamentation, and conical radiation, were discussed. The theoretical studies for ultrashort pulse laser drilling of micro-hole were analyzed. Furthermore, the challenging issues were obtained.